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西安交通大学 [6]

厦门大学 [4]

清华大学 [3]

北京大学 [2]

北京航空航天大学 [2]

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	Design and Experimental Research of a Temperature Compensation System for Silicon-on-Sapphire Pressure Sensors 期刊论文 IEEE SENSORS JOURNAL, 2017, 卷号: 17, 页码: 709-715 作者: Guo, Zhanshe; Lu, Chao; Wang, Yanshan; Liu, Defeng; Huang, Manguo 收藏 \| 浏览/下载：85/0 \| 提交时间：2019/12/30 High-temperature techniques piezoresistive devices pressure sensors silicon on sapphire
	Design of temperature compensation for silicon-sapphire pressure sensor 会议论文 2017 IEEE INTERNATIONAL CONFERENCE ON IMAGING SYSTEMS AND TECHNIQUES (IST), 2017-01-01 作者: Huang Manguo; Liu Defeng; Lu Chao; Guo Zhanshe; Li Xin 收藏 \| 浏览/下载：87/0 \| 提交时间：2019/12/30 temperature compensation high temperature pressure sensors silicon on sapphire
	Monodisperse macromolecules based on benzodithiophene and diketopyrrolopyrrole with strong NIR absorption and high mobility 期刊论文 JOURNAL OF MATERIALS CHEMISTRY C, 2016 Wang, Jiayu; Shi, Keli; Suo, Yue; Lin, Yuze; Yu, Gui; Zhan, Xiaowei 收藏 \| 浏览/下载：6/0 \| 提交时间：2017/12/03 FIELD-EFFECT TRANSISTORS THIN-FILM TRANSISTORS ORGANIC SOLAR-CELLS FLEXIBLE PRESSURE SENSORS 25TH ANNIVERSARY ARTICLE POLYMER SEMICONDUCTORS AMORPHOUS-SILICON ELECTRON-MOBILITY SMALL-MOLECULE SIDE-CHAINS
	Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation 期刊论文 Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495 作者: Zhao, Yulong; Li, Cun; Hao, Mengmeng; Cheng, Rongjun; Fan, Xiaole 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/12/02 thin film finite element method flammable areas fibre conducts light intensity modulation silicon compounds microsensors bulk micromachining technology optical microelectromechanical-system pressure sensor combustible areas optical cables intensity modulation pressure sensors silicon diaphragm deformation micromachining pressure measurement finite element analysis optical cable reflected light intensity shift pressure 0 MPa to 20 MPa signal transmission photoelectric detection circuit micro-optomechanical devices elemental semiconductors optical modulation thin films source light silicon fibre optic sensors
	Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications 期刊论文 Micro & Nano Letters, 2015 Liu, G. D.; Cui, W. P.; Hu, H.; Zhang, F. S.; Zhang, Y. X.; Gao, C. C.; Hao, Y. L. 收藏 \| 浏览/下载：10/0 \| 提交时间：2017/12/03 silicon elemental semiconductors silicon-on-insulator pressure sensors electrodes titanium titanium compounds platinum gold ohmic contacts thermal stability transmission lines Auger electron spectra measurement errors calibration silicon on insulator pressure sensor thermostable electrode high temperature applications thermal stability ohmic contacts linear transmission line method Auger electron spectroscopy calibration nonlinearity error sensitivity pressure 3 DIFFUSION BARRIER
	Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录) 期刊论文 Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science), 2015, 卷号: 43, 页码: 1-8 作者: Hu, Guo-Qing[1]; Gong, Xiao-Shan[1]; Zhou, Yong-Hong[2]; Zou, Chong[2]; Alam, Jahangir[1] 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/04/25 Deformation Pressure sensors Silicon Silicon sensors Stresses Structural optimization Substrates
	Packaging a piezoresistive pressure sensor for intracranial pressure monitoring 会议论文作者: Meng, Xiawei; Zhao, Yulong 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/12/02 Biomedical applications Implantable sensors Intra-cranial pressure Miniaturization Piezo-resistive Piezoresistive pressure sensors Silicon bulk micromachining technology Single-crystal silicon wafers
	A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications 其他 2013-01-01 Zhang, H; Xu, Huiming; Li, Yan; Song, Zij; San, Haisheng; Yu, Yuxi; 伞海生; 余煜玺收藏 \| 浏览/下载：3/0 \| 提交时间：2015/07/22 MEMS Pressure sensors Silicon
	Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process 其他 2013-01-01 Xu, Huiming; Zhang, H; Deng, Zhiqia; San, Haishen; Yu, Yuxi; 伞海生; 余煜玺收藏 \| 浏览/下载：4/0 \| 提交时间：2015/07/22 Fabrication Fixtures (tooling) Pressure sensors Silicon Silicon wafers Wet etching
	MEMS压力传感器的设计及关键工艺技术研究学位论文 2013, 2013 陶也收藏 \| 浏览/下载：3/0 \| 提交时间：2016/01/13 微机电系统压力传感器硅 MEMS pressure sensors silicon

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