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CORC

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Simulation of plastic deformation of sculptured diaphragm silicon microstructure 期刊论文
Microelectronic engineering, 2016, 卷号: 152, 页码: 26-34
作者:  Jiang, Wanli;  Xu, Dehui;  Yao, Shaokang;  Xiong, Bin;  Wang, Yuelin
收藏  |  浏览/下载：100/0  |  提交时间：2019/05/09
Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation 期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:  Zhao, Yulong;  Li, Cun;  Hao, Mengmeng;  Cheng, Rongjun;  Fan, Xiaole
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Highly sensitive seesaw capacitive pressure sensor based on SOI wafer 期刊论文
electronics letters, 2014
Yang, C. C.; Zhao, Q.; Gao, C. C.; Liu, G. D.; Zhang, Y. X.; Cui, W. P.; Hao, Y. L.
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Influence of stress on the performance of PZT thin films for microphone application 会议论文
INTEGRATED FERROELECTRICS, 16th International Symposium on Integrated Ferroelectrics/5th Korean Workshop on High Dielectric Devices and Materials, Gyeongju, SOUTH KOREA, Web of Science, INSPEC
Zhang, NX; Yang, Y; Wu, XM; Ren, TL; Liu, LT
收藏  |  浏览/下载：5/0
Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms 期刊论文
journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134
Yang, JL; Gaspar, J; Paul, O
收藏  |  浏览/下载：24/0  |  提交时间：2010/03/08
Study on the Deformation of Pre-Stressed Centre Diaphragm of Pressure Sensor (CPCI-S收录) 会议
作者:  He, Shenzhi[1];  Hu, Guoqing[1];  Zhou, Yonghong[2];  Wang, Jianling[2];  Zou, Chong[2]
收藏  |  浏览/下载：11/0  |  提交时间：2019/04/11

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