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	Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation
	Zhao, Yulong; Li, Cun; Hao, Mengmeng; Cheng, Rongjun; Fan, Xiaole; Chen, Pei
刊名	Micro & Nano Letters
	2015
卷号	10期号:[db:dc_citation_issue]页码:491-495
关键词	thin film finite element method flammable areas fibre conducts light intensity modulation silicon compounds microsensors bulk micromachining technology optical microelectromechanical-system pressure sensor combustible areas optical cables intensity modulation pressure sensors silicon diaphragm deformation micromachining pressure measurement finite element analysis optical cable reflected light intensity shift pressure 0 MPa to 20 MPa signal transmission photoelectric detection circuit micro-optomechanical devices elemental semiconductors optical modulation thin films source light silicon fibre optic sensors
ISSN号	1750-0443
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3267084
专题	西安交通大学
推荐引用方式 GB/T 7714	Zhao, Yulong,Li, Cun,Hao, Mengmeng,et al. Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation[J]. Micro & Nano Letters,2015,10([db:dc_citation_issue]):491-495.
APA	Zhao, Yulong,Li, Cun,Hao, Mengmeng,Cheng, Rongjun,Fan, Xiaole,&Chen, Pei.(2015).Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation.Micro & Nano Letters,10([db:dc_citation_issue]),491-495.
MLA	Zhao, Yulong,et al."Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation".Micro & Nano Letters 10.[db:dc_citation_issue](2015):491-495.

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