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Influence of stress on the performance of PZT thin films for microphone application 会议论文
INTEGRATED FERROELECTRICS, 16th International Symposium on Integrated Ferroelectrics/5th Korean Workshop on High Dielectric Devices and Materials, Gyeongju, SOUTH KOREA, Web of Science, INSPEC
Zhang, NX; Yang, Y; Wu, XM; Ren, TL; Liu, LT
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