CORC

在结果中检索

CORC

浏览/检索结果: 共49条，第1-10条 帮助

已选(0)清除 条数/页：   排序方式：
硅微静电悬浮加速度计实验研究 期刊论文
2016, 2016
张汉蒸; 韩丰田; 孙搏谦; 马高印; ZHANG Han-zheng; HAN Feng-tian; SUN Bo-qian; MA Gao-yin
收藏  |  浏览/下载：3/0
硅微静电加速度计的支承刚度特性 期刊论文
2016, 2016
韩丰田; 吴秋平; 孙搏谦; 张汉蒸; 马高印; HAN Feng-tian; WU Qiu-ping; SUN Bo-qian; ZHANG Han-zheng; MA Gao-yin
收藏  |  浏览/下载：4/0
Length-extensional resonating gas sensors with ic-foundry compatible low-cost fabrication in non-soi single-wafer 期刊论文
Microelectronic engineering, 2015, 卷号: 136, 页码: 1-7
作者:  Yu, Feng;  Xu, Pengcheng;  Wang, Jiachou;  Li, Xinxin
收藏  |  浏览/下载：70/0  |  提交时间：2019/05/10
Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation 期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:  Zhao, Yulong;  Li, Cun;  Hao, Mengmeng;  Cheng, Rongjun;  Fan, Xiaole
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring 会议论文
作者:  Meng, Xiawei;  Zhao, Yulong
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures 期刊论文
Science China(Information Sciences), 2014
QIAN Liang; YANG ZhenChuan; YAN GuiZhen
收藏  |  浏览/下载：1/0  |  提交时间：2017/12/03
Design and fabrication of high performance wafer-level vacuum packaging based on glass-silicon-glass bonding techniques 期刊论文
journal of micromechanics and microengineering, 2012
Zhang, Jinwen; Jiang, Wei; Wang, Xin; Zhou, Jilong; Yang, Huabing
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
A high-performance micro electret power generator based on microball bearings 期刊论文
journal of micromechanics and microengineering, 2011
Yang, Zhaohui; Wang, Jing; Zhang, Jinwen
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining 期刊论文
micro nano letters, 2011
Tang, Wei; Zheng, Baixiang; Liu, Lei; Chen, Zhe; Zhang, Haixia
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
Status of silicon carbide micromachining, circuits and sensing devices 期刊论文
2011
Tang, Wei; Zhang, Haixia
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13

©版权所有 ©2017 CSpace - Powered by CSpace