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Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications
Liu, G. D. ; Cui, W. P. ; Hu, H. ; Zhang, F. S. ; Zhang, Y. X. ; Gao, C. C. ; Hao, Y. L.
SourceMicro & Nano Letters
2015
Keywordsilicon elemental semiconductors silicon-on-insulator pressure sensors electrodes titanium titanium compounds platinum gold ohmic contacts thermal stability transmission lines Auger electron spectra measurement errors calibration silicon on insulator pressure sensor thermostable electrode high temperature applications thermal stability ohmic contacts linear transmission line method Auger electron spectroscopy calibration nonlinearity error sensitivity pressure 3 DIFFUSION BARRIER
DOI10.1049/mnl.2015.0181
English AbstractA high temperature silicon on insulator pressure sensor utilising a Ti/TiN/Pt/Au electrode is presented for improving the thermal stability of ohmic contacts, which can work stably at high temperatures of up to 500 degrees C. To analyse the characteristics of the electrode at high temperatures, a special test structure is measured using the linear transmission line method and Auger electron spectroscopy. To solve the measurement problem, a novel calibration setup is designed to calibrate the absolute pressure sensor at extremely high temperatures. The measurement results have shown that the pressure sensor has a nonlinearity error of 0.17%FS and a sensitivity of 0.24 mV/kPa with a measurement range of 30-150 kPa at 500 degrees C, indicating the good thermal stability of the ohmic contacts.; National High Technology Research and Development Program of China [2012AA041201]; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University; SCI(E); EI; ARTICLE; pkulgd@163.com; 10; 496-499; 10
Language英语
Citation statistics
Content Type期刊论文
URIhttp://www.corc.org.cn/handle/1471x/2720756
Collection信息科学技术学院
Recommended Citation
GB/T 7714
Liu, G. D.,Cui, W. P.,Hu, H.,et al. Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications[J]. Micro & Nano Letters,2015.
APA Liu, G. D..,Cui, W. P..,Hu, H..,Zhang, F. S..,Zhang, Y. X..,...&Hao, Y. L..(2015).Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications.Micro & Nano Letters.
MLA Liu, G. D.,et al."Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications".Micro & Nano Letters (2015).
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