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	Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)
	Hu, Guo-Qing[1]; Gong, Xiao-Shan[1]; Zhou, Yong-Hong[2]; Zou, Chong[2]; Alam, Jahangir[1]
刊名	Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science)
	2015
卷号	43页码:1-8
关键词	Deformation Pressure sensors Silicon Silicon sensors Stresses Structural optimization Substrates
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2210930
专题	华南理工大学
作者单位	1.[1] School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 2.Guangdong, China 3.[2] Fujian Wide Plus Precision Instruments Co. Ltd., Fuzhou 4.Fujian, China
推荐引用方式 GB/T 7714	Hu, Guo-Qing[1],Gong, Xiao-Shan[1],Zhou, Yong-Hong[2],等. Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)[J]. Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science),2015,43:1-8.
APA	Hu, Guo-Qing[1],Gong, Xiao-Shan[1],Zhou, Yong-Hong[2],Zou, Chong[2],&Alam, Jahangir[1].(2015).Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录).Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science),43,1-8.
MLA	Hu, Guo-Qing[1],et al."Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)".Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science) 43(2015):1-8.

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