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西安交通大学 [5]
北京大学 [3]
长春光学精密机械与物... [1]
半导体研究所 [1]
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期刊论文 [9]
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A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference
期刊论文
Sensors, 2022, 卷号: 22, 期号: 5
作者:
Y. Qi
;
M. Zhao
;
B. Li
;
Z. Ren
;
B. Li and X. Wei
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2023/06/14
Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance
期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:
Zhang, Guo-Dong
;
Zhao, Yu-Long
;
Zhao, Yun
;
Wang, Xin-Chen
;
Wei, Xue-Yong
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
high-temperature resistance
microelectromechanical systems (MEMS) technology
silicon-on-insulator (SOI) piezoresistive element
small size
ultra-high pressure sensor
Note: High temperature pressure sensor for petroleum well based on silicon over insulator
期刊论文
REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 卷号: 86, 期号: [db:dc_citation_issue]
作者:
Tian, Bian
;
Liu, Hanyue
;
Yang, Ning
;
Zhao, Yulong
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
High temperature pressure sensor using a thermostable electrode
其他
2015-01-01
Liu, G.D.
;
Cui, W.P.
;
Hu, H.
;
Zhang, F.S.
;
Zhang, Y.X.
;
Gao, C.C.
;
Hao, Y.L.
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2017/12/03
Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications
期刊论文
Micro & Nano Letters, 2015
Liu, G. D.
;
Cui, W. P.
;
Hu, H.
;
Zhang, F. S.
;
Zhang, Y. X.
;
Gao, C. C.
;
Hao, Y. L.
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2017/12/03
silicon
elemental semiconductors
silicon-on-insulator
pressure sensors
electrodes
titanium
titanium compounds
platinum
gold
ohmic contacts
thermal stability
transmission lines
Auger electron spectra
measurement errors
calibration
silicon on insulator pressure sensor
thermostable electrode
high temperature applications
thermal stability
ohmic contacts
linear transmission line method
Auger electron spectroscopy
calibration
nonlinearity error
sensitivity
pressure 3
DIFFUSION BARRIER
Highly sensitive seesaw capacitive pressure sensor based on SOI wafer
期刊论文
electronics letters, 2014
Yang, C. C.
;
Zhao, Q.
;
Gao, C. C.
;
Liu, G. D.
;
Zhang, Y. X.
;
Cui, W. P.
;
Hao, Y. L.
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/13
The design and fabrication of high pressure sensor based on SOI wafer
期刊论文
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2011, 卷号: 43, 期号: [db:dc_citation_issue], 页码: 352-354
作者:
Tian, Bian
;
Zhao, Yu-Long
;
Jiang, Zhuang-De
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/10
High linearity
High pressure
High pressure sensors
High temperature
High-pressure and temperatures
Piezo-resistive sensors
Silicon on insulator wafers
Thick membranes
High-temperature piezoresistive pressure sensitive silicon chip and electrostatic bonding process
期刊论文
Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology, 2011, 卷号: 31, 期号: [db:dc_citation_issue], 页码: 1162-1167
作者:
Zhao, Li-Bo
;
Zhao, Yu-Long
;
Rahman, Hebibul
;
Fang, Xu-Dong
;
Li, Jian-Bo
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/10
Electrostatic bonding
Engineering applications
High temperature
High-temperature pressure sensor
Inverted-cup
MEMS (microelectro-mechanical-system)
Pressure sensitive
Silicon on insulator (SOI)
Inverted-Cup High-Temperature and High-Frequency Piezoresistive Pressure Sensor
期刊论文
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2010, 卷号: 44, 期号: [db:dc_citation_issue], 页码: 50-54
作者:
Zhao, Libo
;
Zhao, Yulong
;
Li, Jianbo
;
Liang, Jianqiang
;
Li, Yong
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/10
Flush-type
High-temperature adhesives
Micro electromechanical system (MEMS)
Micro electro mechanical system
Piezo-resistive
Piezoresistive pressure sensors
Pre-tightening forces
Silicon on insulator (SOI)
Study of GaN growth on ultra-thin Si membranes
期刊论文
solid-state electronics, 2008, 卷号: 52, 期号: 6, 页码: 986-989
Wang X
;
Wu AM
;
Chen J
;
Wang X
;
Wu YX
;
Zhu JJ
;
Yang H
收藏
  |  
浏览/下载:58/2
  |  
提交时间:2010/03/08
GaN
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