| Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance | |
| Zhang, Guo-Dong; Zhao, Yu-Long; Zhao, Yun; Wang, Xin-Chen; Wei, Xue-Yong | |
| 刊名 | MICROMACHINES
 |
| 2018 | |
| 卷号 | 9 |
| 关键词 | high-temperature resistance microelectromechanical systems (MEMS) technology silicon-on-insulator (SOI) piezoresistive element small size ultra-high pressure sensor |
| ISSN号 | 2072-666X |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2922940 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Zhang, Guo-Dong,Zhao, Yu-Long,Zhao, Yun,et al. Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance[J]. MICROMACHINES,2018,9. |
| APA | Zhang, Guo-Dong,Zhao, Yu-Long,Zhao, Yun,Wang, Xin-Chen,&Wei, Xue-Yong.(2018).Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance.MICROMACHINES,9. |
| MLA | Zhang, Guo-Dong,et al."Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance".MICROMACHINES 9(2018). |
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