A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference

doi:10.3390/s22051973

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	A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference
	Y. Qi; M. Zhao; B. Li; Z. Ren; B. Li and X. Wei
刊名	Sensors
	2022
卷号	22 期号:5
ISSN号	14248220
DOI	10.3390/s22051973
英文摘要	Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical FabryPerot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS. 2022 by the authors. Licensee MDPI, Basel, Switzerland.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66474]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Qi,M. Zhao,B. Li,et al. A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference[J]. Sensors,2022,22(5).
APA	Y. Qi,M. Zhao,B. Li,Z. Ren,&B. Li and X. Wei.(2022).A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference.Sensors,22(5).
MLA	Y. Qi,et al."A Compact Optical MEMS Pressure Sensor Based on FabryPerot Interference".Sensors 22.5(2022).