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北京大学 [25]
微电子研究所 [3]
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西安光学精密机械研究... [1]
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期刊论文 [14]
其他 [11]
专利 [3]
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Source-drain resistance characteristics of back-channel etched amorphous InGaZnO thin film transistors with TiO2:Nb protective layer
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017
Zhang, Letao
;
Zhou, Xiaoliang
;
Chang, Baozhu
;
Wang, Longyan
;
Xiao, Yuxiang
;
He, Hongyu
;
Zhang, Shengdong
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2017/12/03
Amorphous indium gallium zinc oxide
Thin film transistors
Source-drain parasitic resistance
TiO2:Nb
Films thickness
THRESHOLD VOLTAGE
ANATASE TIO2
PERFORMANCE
SHIFT
TFTS
Nb Doped TiO2 Protected Back-Channel-Etched Amorphous InGaZnO Thin Film Transistors
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2017
Zhang, Letao
;
Zhou, Xiaoliang
;
Yang, Huan
;
He, Hongyu
;
Wang, Longyan
;
Zhang, Min
;
Zhang, Shengdong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
Amorphous indium gallium zinc oxide (a-IGZO)
thin film transistors (TFTs)
back-channel-etch (BCE) process
Nb doped TiO2
THRESHOLD VOLTAGE
CARBON-NANOFILM
BARRIER LAYER
PERFORMANCE
SHIFT
FOI FinFET with Ultra-low Parasitic Resistance Enabled by Fully Metallic Source and Drain Formation on Isolated Bulk-Fin
会议论文
作者:
Wu ZH(吴振华)
;
Luo J(罗军)
;
Meng LK(孟令款)
;
Zhang QZ(张青竹)
;
Li YD(李昱东)
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2017/05/19
Sn-doped ZnO thin-film transistors with AZO, TZO and Al heterojunction source/drain contacts
期刊论文
ELECTRONICS LETTERS, 2016
Zhang, Yi
;
Han, Dedong
;
Huang, Lingling
;
Dong, Junchen
;
Cong, Yingying
;
Cui, Guodong
;
Zhang, Xiaomi
;
Zhang, Xing
;
Zhang, Shengdong
;
Wang, Yi
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2017/12/03
thin film transistors
electrical contacts
tin
zinc compounds
indium compounds
tin compounds
tin-doped zinc oxide thin-film transistors
heterojunction source-drain contacts
bottom gate
top contact thin-film transistors
glass substrate
indium tin oxide thin films
alumni zinc oxide thin films
AZO thin films
aluminium thin films
AZO S-D electrode
saturation mobility
subthreshold slope
on-off current ratio
output characteristic
parasitic resistance
contact performance
t
半导体器件及其制造方法
专利
专利号: US9012965, 申请日期: 2015-04-21, 公开日期: 2012-07-19
作者:
罗军
;
赵超
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2016/09/19
半导体器件及其制造方法
专利
专利号: US8710556, 申请日期: 2014-04-29, 公开日期: 2011-07-07
作者:
尹海洲
;
梁擎擎
;
骆志炯
;
朱慧珑
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2015/05/28
A novel method for measuring parasitic resistance in high electron mobility transistors
期刊论文
固体电子学, 2014
Yang, Zhen
;
Wang, Jinyan
;
Li, Xiaoping
;
Zhang, Bo
;
Zhao, Jian
;
Xu, Zhe
;
Wang, Maojun
;
Yu, Min
;
Yang, Zhenchuan
;
Wu, Wengang
;
Zhang, Yuming
;
Zhang, Jincheng
;
Ma, Xiaohua
;
Hao, Yue
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2015/11/10
Parasitic resistance
High-electron mobility transistor (HEMT)
Floating-gate
Predictive 3-D Modeling of Parasitic Gate Capacitance in Gate-all-Around Cylindrical Silicon Nanowire MOSFETs
期刊论文
ieee电子器件汇刊, 2011
Zou, Jibin
;
Xu, Qiumin
;
Luo, Jieying
;
Wang, Runsheng
;
Huang, Ru
;
Wang, Yangyuan
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
Modeling
parasitic gate capacitance
Schwarz-Christoffel mapping
silicon nanowire MOSFETs (SNWTs)
source/drain extension (SDE)
SOURCE/DRAIN UNDERLAP
FRINGE CAPACITANCE
CARRIER TRANSPORT
CMOS DEVICES
PERFORMANCE
OPTIMIZATION
TRANSISTORS
TECHNOLOGY
INTEGRATION
RESISTANCE
New Observations and Impacts of Diameter-Dependent Annealing Effects in Silicon Nanowire Transistors
其他
2011-01-01
Wang, Runsheng
;
Yu, Tao
;
Huang, Ru
;
Ding, Wei
;
Wang, Yangyuan
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2015/11/13
DENSITY-GRADIENT MODEL
DESIGN OPTIMIZATION
NANOSCALE MOSFETS
CARRIER TRANSPORT
ION-IMPLANTATION
CMOS TECHNOLOGY
DRIFT-DIFFUSION
SIMULATION
PERFORMANCE
New observations and impacts of diameter-dependent annealing effects in silicon nanowire transistors
期刊论文
Japanese Journal of Applied Physics, 2011
Wang, Runsheng
;
Yu, Tao
;
Huang, Ru
;
Ding, Wei
;
Wang, Yangyuan
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2017/12/03
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