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Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide
期刊论文
Applied Physics B: Lasers and Optics, 2022, 卷号: 128, 期号: 8
作者:
Ren, Yaqian
;
Wang, Xiangxian
;
Di, Xiujuan
;
Chen, Zhenyu
;
Jia, Tianxu
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2022/08/09
Cladding (coating)
Fabrication
Lithography
Metals
Dielectric structure
Film layers
Gratings fabrication
Metal-films
Mode interference
Numerical results
Resist thickness
Sub-wave length grating
Symmetrics
Theoretical study
Multi-Layer Subwavelength Circular Grating Fabricated by High-Order Waveguide Mode Interference and Continuous Sample Rotation
期刊论文
LASER & OPTOELECTRONICS PROGRESS, 2022, 卷号: 59, 期号: 11
作者:
Su Yingwen
;
Chen Zhenyu
;
Xu Yueqi
;
Wang Xiangxian
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2022/08/09
optical design and fabrication
micro-nano lithography
high-order waveguide mode interference
multi-layer subwavelength circular grating
Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation
期刊论文
Optical and Quantum Electronics, 2022, 卷号: 54, 期号: 4
作者:
Jia, Tianxu
;
Ren, Yaqian
;
Wang, Xiangxian
;
Qi, Yunping
;
Wen, Xiaolei
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2022/04/21
Dielectric materials
Electric excitation
Fabrication
Enhanced kretschmann structure
Interference lithography
Kretschmann
Sample rotation
Structure fabrication
Sub-wavelength structures
Surface plasmon excitation
Surface-plasmon
Theoretical methods
Theoretical study
Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating
期刊论文
MODERN PHYSICS LETTERS B, 2022, 卷号: 36, 期号: 4
作者:
Wang, Xiangxian
;
Ren, Yaqian
;
Jia, Tianxu
;
Su, Yingwen
;
Qi, Yunping
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2022/03/01
Surface plasmon lithography
complementary grating
periodic pattern
Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography
期刊论文
Applied Sciences-Basel, 2022, 卷号: 12, 期号: 15, 页码: 13
作者:
Y. Song
;
N. Zhang
;
Y. J. Liu
;
L. Zhang and Z. W. Liu
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  |  
浏览/下载:0/0
  |  
提交时间:2023/06/14
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system
期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:
X. S. Chen
;
S. Jiang
;
Y. B. Li
;
Y. X. Jiang
;
W. Wang and Bayanheshig
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2023/06/14
Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations
期刊论文
MODERN PHYSICS LETTERS B, 2021, 卷号: 35, 期号: 32
作者:
Wang, Xiangxian
;
Jia, Tianxu
;
Zhu, Jiankai
;
Su, Yingwen
;
Zhang, Liping
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2021/12/17
Laser interference lithography
polarization
periodic pattern
Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
期刊论文
COATINGS, 2021, 卷号: 11, 期号: 1, 页码: 7
作者:
Jia, Tianxu
;
Wang, Xiangxian
;
Ren, Yaqian
;
Su, Yingwen
;
Zhang, Liping
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2021/12/10
laser interference lithography
microstructure
incidence angle
Method for exposure dose monitoring and control in scanning beam interference lithography
期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 10, 页码: 2767-2774
作者:
Y. Song
;
Y. Liu
;
S. Jiang
;
Y. Zhu
;
L. Zhang and Z. Liu
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2022/06/13
Active control technology of a diffraction grating wavefront by scanning beam interference lithography
期刊论文
Optics Express, 2021, 卷号: 29, 期号: 23, 页码: 5
作者:
Z. Liu
;
H. Yang
;
Y. Li
;
S. Jiang
;
W. Wang
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2022/06/13
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