Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation

doi:10.1007/s11082-022-03596-w

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	Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation
	Jia, Tianxu 2; Ren, Yaqian 2; Wang, Xiangxian 2; Qi, Yunping 1; Wen, Xiaolei 3
刊名	Optical and Quantum Electronics
	2022-04-01
卷号	54 期号:4
关键词	Dielectric materials Electric excitation Fabrication Enhanced kretschmann structure Interference lithography Kretschmann Sample rotation Structure fabrication Sub-wavelength structures Surface plasmon excitation Surface-plasmon Theoretical methods Theoretical study
ISSN号	0306-8919
DOI	10.1007/s11082-022-03596-w
英文摘要	A theoretical method of nanoscale lithography based on the enhanced Kretschmann structure and excitation of surface plasmons to fabricate periodic 2D sub-wavelength structures is proposed in this paper. The optical field distribution, which is greatly enhanced by using the enhanced Kretschmann structure, can be determined using the finite element method and related formulas to simulate rotation and exposure of a lithography sample. Consequently, various sub-wavelength structures can be modeled through different rotation methods and exposure times, such as square dot arrays, quasi-hexagonally close-packed structures, and circular grating structures. In addition, if the metal and dielectric materials are determined, various reflection spectra can be chosen from by combining different metal and dielectric thicknesses. This proposed method has the advantages of low cost, high resolution, and high efficiency, providing a prospective fabrication method for 2D sub-wavelength structures in practical applications. © 2022, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature.
WOS研究方向	Engineering ; Physics ; Optics
语种	英语
出版者	Springer
WOS记录号	WOS:000768434000014
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/157884]
专题	理学院
作者单位	1.College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou; 730070, China; 2.School of Science, Lanzhou University of Technology, Lanzhou; 730050, China; 3.Center for Micro- and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei; 230026, China
推荐引用方式 GB/T 7714	Jia, Tianxu,Ren, Yaqian,Wang, Xiangxian,et al. Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation[J]. Optical and Quantum Electronics,2022,54(4).
APA	Jia, Tianxu,Ren, Yaqian,Wang, Xiangxian,Qi, Yunping,&Wen, Xiaolei.(2022).Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation.Optical and Quantum Electronics,54(4).
MLA	Jia, Tianxu,et al."Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation".Optical and Quantum Electronics 54.4(2022).