Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating

doi:10.1142/S0217984921505539

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	Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating
	Wang, Xiangxian 3; Ren, Yaqian 3; Jia, Tianxu 3; Su, Yingwen 3; Qi, Yunping 1; Wen, Xiaolei 2
刊名	MODERN PHYSICS LETTERS B
	2022-02-10
卷号	36 期号:4
关键词	Surface plasmon lithography complementary grating periodic pattern
ISSN号	0217-9849
DOI	10.1142/S0217984921505539
英文摘要	This paper presents a surface plasmon interference lithography technique based on the complementary grating, which comprises silicon gratings and complementary aluminum grating masks, for fabricating subwavelength structures. In this theoretical study, the optimal parameters of the complementary grating structure were determined using the reflectance spectrum. The optical field distributions of one- and two-dimensional subwavelength structures were obtained using the finite-difference time-domain method and rotation-related formulas. The results of numerical evaluations show that a one-dimensional periodic structure with a half-pitch resolution of 60.5 nm (approximately lambda/6.7) can be fabricated. In addition, subwavelength structures can be diversified using different rotation methods to expose the photolithography samples, such as square dot arrays and quasi-hexagonal closely packed structures. The proposed method combines surface plasmon interference with sample rotation, thereby enabling fabrication of abundant subwavelength structures.
WOS研究方向	Physics
语种	英语
出版者	WORLD SCIENTIFIC PUBL CO PTE LTD
WOS记录号	WOS:000753697600010
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/154794]
专题	理学院
作者单位	1.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China; 2.Univ Sci & Technol China, Ctr Micro & Nanoscale Res & Fabricat, Hefei 230026, Peoples R China 3.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China;
推荐引用方式 GB/T 7714	Wang, Xiangxian,Ren, Yaqian,Jia, Tianxu,et al. Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating[J]. MODERN PHYSICS LETTERS B,2022,36(4).
APA	Wang, Xiangxian,Ren, Yaqian,Jia, Tianxu,Su, Yingwen,Qi, Yunping,&Wen, Xiaolei.(2022).Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating.MODERN PHYSICS LETTERS B,36(4).
MLA	Wang, Xiangxian,et al."Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating".MODERN PHYSICS LETTERS B 36.4(2022).