CORC

在结果中检索

CORC

浏览/检索结果: 共15条，第1-10条 帮助

已选(0)清除 条数/页：   排序方式：
Space advanced technology demonstration satellite 期刊论文
SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2023, 页码: 19
作者:  Zhang, Xiaofeng;  Chen, Wen;  Zhu, Xiaocheng;  Meng, Na;  He, Junwang
收藏  |  浏览/下载：3/0  |  提交时间：2024/02/22
Space advanced technology demonstration satellite 期刊论文
SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2023, 页码: 19
作者:  Zhang, Xiaofeng;  Chen, Wen;  Zhu, Xiaocheng;  Meng, Na;  He, Junwang
收藏  |  浏览/下载：3/0  |  提交时间：2024/02/05
A 3D MEMS In-Chip Solenoid Inductor of High Inductance Density for Future Power-MEMS Device 会议论文
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 2019-06-23
作者:  Xu, Tiantong;  Sun, Jiamian;  Wu, Hanxiao;  Li, Haiwang;  Li, Hanqing
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/30
3D MEMS In-Chip Solenoid Inductor With High Inductance Density for Power MEMS Device 期刊论文
IEEE ELECTRON DEVICE LETTERS, 2019, 卷号: 40, 页码: 1816-1819
作者:  Xu, Tiantong;  Sun, Jiamian;  Wu, Hanxiao;  Li, Haiwang;  Li, Hanqing
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/30
A quality quantitative method of silicon direct bonding based on wavelet image analysis 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 卷号: 28
作者:  Tan, Xiao;  Tao, Zhi;  Li, Haiwang;  Xu, Tiantong;  Yu, Mingxing
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/30
Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2018, 卷号: 36
作者:  Xu, Tiantong;  Tao, Zhi;  Lozano, Paulo C.
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/30
Fabrication and Optimization of High Aspect Ratio Through-Silicon-Vias Electroplating for 3D Inductor 期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:  Li, Haiwang;  Liu, Jiasi;  Xu, Tiantong;  Xia, Jingchao;  Tan, Xiao
收藏  |  浏览/下载：10/0  |  提交时间：2019/12/30
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing 期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:  Yu, Mingxing;  Lv, Pin;  Xu, Tiantong;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/30
Effects of deep reactive ion etching parameters on etching rate and surface morphology in extremely deep silicon etch process with high aspect ratio 期刊论文
ADVANCES IN MECHANICAL ENGINEERING, 2017, 卷号: 9
作者:  Xu, Tiantong;  Tao, Zhi;  Li, Hanqing;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/30
One-time Multi-depth Silicon Etching Method Based on SiO2 Masking Layer 会议论文
PROCEEDINGS OF THE ASME 5TH INTERNATIONAL CONFERENCE ON MICRO/NANOSCALE HEAT AND MASS TRANSFER, 2016, VOL 2, 2016-01-01
作者:  Tan, Xiao;  Tao, Zhi;  Xu, Tiantong;  Li, Haiwang
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/30

©版权所有 ©2017 CSpace - Powered by CSpace