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科研机构
北京大学 [8]
内容类型
其他 [4]
期刊论文 [4]
发表日期
2015 [1]
2011 [1]
2010 [1]
2008 [4]
2007 [1]
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专题:北京大学
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Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications
期刊论文
Micro & Nano Letters, 2015
Liu, G. D.
;
Cui, W. P.
;
Hu, H.
;
Zhang, F. S.
;
Zhang, Y. X.
;
Gao, C. C.
;
Hao, Y. L.
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2017/12/03
silicon
elemental semiconductors
silicon-on-insulator
pressure sensors
electrodes
titanium
titanium compounds
platinum
gold
ohmic contacts
thermal stability
transmission lines
Auger electron spectra
measurement errors
calibration
silicon on insulator pressure sensor
thermostable electrode
high temperature applications
thermal stability
ohmic contacts
linear transmission line method
Auger electron spectroscopy
calibration
nonlinearity error
sensitivity
pressure 3
DIFFUSION BARRIER
Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications
期刊论文
journal of micro nanolithography mems and moems, 2011
Liu, Bo
;
Lv, Zhiqiu
;
He, Xunjun
;
Hao, Yilong
;
Li, Zhihong
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/13
radio frequency microelectromechanical system switches
ohmic contacts
microsprings
power-handling ability
metallic sacrificial layers
surface micromachining
RF-MEMS SWITCH
SACRIFICIAL LAYER
MICROSWITCHES
TRANSPORT
CONTACTS
Analysis of surface roughness in Ti/Al/Ni/Au Ohmic contact to AlGaN/GaN high electron mobility transistors
期刊论文
应用物理学快报, 2010
Gong, Rumin
;
Wang, Jinyan
;
Liu, Shenghou
;
Dong, Zhihua
;
Yu, Min
;
Wen, Cheng P.
;
Cai, Yong
;
Zhang, Baoshun
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
aggregation
aluminium
aluminium compounds
gallium compounds
gold
high electron mobility transistors
III-V semiconductors
nickel
ohmic contacts
rapid thermal annealing
semiconductor-metal boundaries
surface morphology
surface roughness
titanium
transmission electron microscopy
wide band gap semiconductors
X-ray chemical analysis
MICROSTRUCTURE
RESISTANCE
GAN
Fabrication of carbon nanotube diode with atomic force microscopy manipulation
期刊论文
journal of physical chemistry c, 2008
Jiao, Liying
;
Xian, Xiaojun
;
Fan, Ben
;
Wu, Zhongyun
;
Zhang, Jin
;
Liu, Zhongfan
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/10
FIELD-EFFECT TRANSISTORS
OHMIC CONTACTS
Novel structural Ti/Al-based ohmic contacts on AlGaN/GaN heterostructures
其他
2008-01-01
Dong, Zhihua
;
Wang, Jinyan
;
Yu, Min
;
Hao, Yilong
;
Wen, C. P.
;
Wang, Yangyuan
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
AlGaN/GaN
ohmic contacts
surface morphology
PERFORMANCE
HEMTS
POWER
A Novel Application of Anodic Bonding for Electrical Interconnect and Its Parameter Characterization
其他
2008-01-01
Fan, Xuejiao
;
Zhang, Dacheng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
anodic bonding
contact resistance
bonded vertical Kelvin method
OHMIC CONTACTS
Novel structural Ti/Al-based ohmic contacts on AlGaN/GaN heterostructures
其他
2008-01-01
Zhihua Dong
;
Jinyan Wang
;
Min Yu
;
Yilong Hao
;
Yangyuan Wang
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2017/12/03
AlGaN/GaN
ohmic contacts
surface morphology
AlGaN/GaN
ohmic contacts
surface morphology
Role of interface layers and localized states in TiAl-based ohmic contacts to p-type 4H-SiC
其他
2007-01-01
Gao, M.
;
Tsukimoto, S.
;
Goss, S. H.
;
Tumakha, S. P.
;
Onishi, T.
;
Murakami, M.
;
Brillson, L. J.
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/10
ohmic contact
p-type 4H-SiC
work function
Ti3SiC2
interface
localized states
ELECTRICAL-PROPERTIES
SILICON-CARBIDE
AL/TI CONTACTS
IMPLANTATION
MECHANISM
TI3SIC2
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