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CORC

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Plasma enhanced atomic layer deposition of HfO2 with in situ plasma treatment 期刊论文
MICROELECTRONIC ENGINEERING, 2012, 卷号: 93, 页码: 15-18
Xu, DW; Cheng, XH; Zhang, YW; Wang, ZJ; Xia, C; Cao, D; Yu, YH; Shen, DS
收藏  |  浏览/下载：10/0  |  提交时间：2013/04/17
Plasma enhanced atomic layer deposition of HfO2 with in situ plasma treatment 期刊论文
MICROELECTRONIC ENGINEERING, 2012, 卷号: 93, 页码: 15-18
Xu, DW; Cheng, XH; Zhang, YW; Wang, ZJ; Xia, C; Cao, D; Yu, YH; Shen, DS
收藏  |  浏览/下载：12/0  |  提交时间：2013/05/10
Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2011, 卷号: 40, 期号: 8, 页码: 1344-1347
Xu, DP; Wan, L; （程新红）; He, DW; Song, ZR; Yu, YH; Shen, DS
收藏  |  浏览/下载：8/0  |  提交时间：2012/04/10
Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2011, 卷号: 40, 期号: 8, 页码: 1344-1347
Xu, DP; Wan, L; Cheng, XH（重点实验室）; He, DW; Song, ZR; Yu, YH（重点实验室）; Shen, DS
收藏  |  浏览/下载：15/0  |  提交时间：2013/05/10
The properties of high-k gate dielectric films deposited on HRSOI 期刊论文
MICROELECTRONIC ENGINEERING, 2009, 卷号: 86, 期号: 12, 页码: 2404-2407
Cheng, XH; Xu, DP; Song, ZR; He, DW; Yu, YH; Zhao, QT; Shen, DS
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
Interfacial and electrical characterization of HfO2 gate dielectric film with a blocking layer of Al2O3 期刊论文
ULIS 2009: 10TH INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION OF SILICON, 2009, 页码: 205-208
Cheng, XH; He, DW; Song, ZR; Yu, YH; Zhao, QT; Shen, DS
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
Exciton localization effect in Mn-implanted GaN by photoluminescence measurements 期刊论文
PHYSICA B-CONDENSED MATTER, 2009, 卷号: 404, 期号: 8-11, 页码: 1222-1225
Meng, XY; Zhang, YH; Shen, WZ
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
Interfacial and Electrical Characterization of HfO2 Gate Dielectric Film with a Blocking Layer of Al2O3 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2009, 卷号: 38, 期号: 2, 页码: 189-192
Cheng, XH; He, DW; Song, ZR; Yu, YH; Shen, DS
收藏  |  浏览/下载：16/0  |  提交时间：2012/03/24
Characterization of gadolinium oxide film by pulse laser deposition 期刊论文
APPLIED SURFACE SCIENCE, 2009, 卷号: 256, 期号: 3, 页码: 921-923
Cheng, XH; Xu, DP; Song, ZR; He, DW; Yu, YH; Zhao, QT; Shen, DS
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
SILICON  PR2O3  GD2O3  
Interfacial and electrical characterization of HfO(2) gate dielectric film with a blocking layer of Al(2)O(3) 期刊论文
ULIS 2009: 10TH INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION OF SILICON, 2009, 页码: 205-208
Cheng, XH（重点实验室）; He, DW; Song, ZR（重点实验室）; Yu, YH（重点实验室）; Zhao, QT; Shen, DS
收藏  |  浏览/下载：12/0  |  提交时间：2013/05/10

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