Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe

	Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe
	Xu, DP ; Wan, L ; Cheng, XH（重点实验室） ; He, DW ; Song, ZR ; Yu, YH（重点实验室） ; Shen, DS
刊名	RARE METAL MATERIALS AND ENGINEERING
	2011
卷号	40 期号:8 页码:1344-1347
关键词	Materials Science Multidisciplinary Metallurgy & Metallurgical Engineering
ISSN号	1002-185X
学科主题	Materials Science; Metallurgy & Metallurgical Engineering
收录类别	SCI
公开日期	2013-05-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/115133]
专题	上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文
推荐引用方式 GB/T 7714	Xu, DP,Wan, L,Cheng, XH,et al. Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe[J]. RARE METAL MATERIALS AND ENGINEERING,2011,40(8):1344-1347.
APA	Xu, DP.,Wan, L.,Cheng, XH.,He, DW.,Song, ZR.,...&Shen, DS.(2011).Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe.RARE METAL MATERIALS AND ENGINEERING,40(8),1344-1347.
MLA	Xu, DP,et al."Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe".RARE METAL MATERIALS AND ENGINEERING 40.8(2011):1344-1347.