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Reduction of NiGe/n-and p-Ge Specific Contact Resistivity by Enhanced Dopant Segregation in the Presence of Carbon During Nickel Germanidation 期刊论文
IEEE Transactions on Electron Devices, 2016
作者:  Duan NY(段宁远);  Wang GL(王桂磊);  Liu JB(刘金彪);  Eddy simoen;  Mao SJ(毛淑娟)
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