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Complexing Between Additives and Ceria Abrasives Used for Polishing Silicon Dioxide and Silicon Nitride Films 期刊论文
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 卷号: 14, 期号: 3, 页码: H128-H131
Wang,LY; Liu,B; Song,ZT; Liu,WL; Feng,SL; Huang,D; Babu,SV
收藏  |  浏览/下载:13/0  |  提交时间:2012/04/10
Analysis of IBAD silicon oxynitride film for anti-reflection coating application 期刊论文
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 卷号: 333, 期号: 3, 页码: 296-300
Wang,YJ; Cheng,XL; Lin,ZL; Zhang,CS; Xiao,HB; Zhang,F; Zou,SC
收藏  |  浏览/下载:12/0  |  提交时间:2012/03/24
AlN thin films prepared by reactive ion beam coating 期刊论文
FUNDAMENTAL MECHANISMS OF LOW-ENERGY-BEAM-MODIFIED SURFACE GROWTH AND PROCESSING, 2000, 卷号: 585, 期号: 0, 页码: 251-256
Cheng,LL; Yu,YH; Sundaravel,B; Luo,EZ; Lin,S; Lei,YM; Ren,CX; Cheung,WY; Wong,SP; Xu,JB; Wilson,IH
收藏  |  浏览/下载:55/0  |  提交时间:2012/03/24
Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method 期刊论文
SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES, 1996, 卷号: 39, 期号: 4, 页码: 404-411
Xin,HP; Lin,CL; Xu,HP; Zou,SC; Shi,XH; Wu,XL; Zhu,H; Hemment,PLF
收藏  |  浏览/下载:14/0  |  提交时间:2012/03/25
SYNTHESIS OF SILICON-NITRIDE FILMS BY ION-BEAM-ENHANCED DEPOSITION AND THEIR PROTECTIVE PROPERTIES AGAINST OXIDATION 期刊论文
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 卷号: 120, 期号: 0, 页码: 519-523
TANIGUCHI,S; SHIBATA,T; NAKAMURA,K; LIU,XH; ZHENG,ZH; HWANG,W; Zou,SC
收藏  |  浏览/下载:5/0  |  提交时间:2012/03/25


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