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Effects of deposition temperature on the properties of sputtered yttrium-doped hafnium oxide thin films 期刊论文
MATERIALS RESEARCH EXPRESS, 2019, 卷号: 6
作者:  Zhao, Peng;  Zhou, Dayu;  Liu, Feng;  Sun, Nana;  Li, Shuaidong
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/02
Microstructure, wettability, optical and electrical properties of HfO2 thin films: Effect of oxygen partial pressure 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 卷号: 662, 期号: 无, 页码: 339-347
作者:  Gao, J.;  He, G.;  Deng, B.;  Xiao, D. Q.;  Liu, M.
收藏  |  浏览/下载:14/0  |  提交时间:2017/10/18
Microstructure, wettability, optical and electrical properties of HfO2 thin films: Effect of oxygen partial pressure 期刊论文
Journal of Alloys and Compounds, 2016, 卷号: Vol.662, 页码: 339-347
作者:  Jin,P.;  Xiao,D. Q.;  Zheng,C. Y.;  Sun,Z. Q.;  Liu,M.
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/22
Facing-target mid-frequency magnetron reactive sputtered hafnium oxide film: Morphology and electrical properties 期刊论文
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2016, 卷号: 68, 页码: 679-685
作者:  Zhang, Yu;  Xu, Jun;  Wang, You-Nian;  Choi, Chi Kyu;  Zhou, Da-Yu
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/09
Effects of Oxygen Partial Pressure on the Sputtered Hafnium Oxide Thin Films for Resistive Random-Access Memory 会议论文
作者:  Xie, Zhongliang;  Lai, Yunfeng
收藏  |  浏览/下载:1/0  |  提交时间:2019/11/21
Spectroscopic ellipsometry and positron annihilation investigation of sputtered HfO2 films 期刊论文
THIN SOLID FILMS, 2011, 卷号: 519, 期号: 19, 页码: 6349-6353
作者:  Ma, ZW;  Liu, LX;  Xie, YZ;  Su, YR;  Zhao, HT
收藏  |  浏览/下载:20/0  |  提交时间:2016/06/29


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