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Studies on H2O-based Atomic Layer Deposition of Al2O3 Dielectric on Pristine Graphene 期刊论文
JOURNAL OF INORGANIC MATERIALS, 2012, 卷号: 27, 期号: 9, 页码: 956-960
Zhang, YW; Wan, L; Cheng, XH; Wang, ZJ; Xia, C; Cao, D; Jia, TT; Yu, YH
收藏  |  浏览/下载:84/0  |  提交时间:2013/04/17
Characterization of Hafnium-Zirconium-Oxide-Nitride films grown by ion beam assisted deposition 期刊论文
VACUUM, 2012, 卷号: 86, 期号: 8, 页码: 1078-1082
Jin, CG; Yu, T; Bo, Y; Zhao, Y; Zhang, HY; Dong, YJ; Wu, XM; Zhuge, LJ; Ge, SB
收藏  |  浏览/下载:16/0  |  提交时间:2013/04/17
Interface dipole engineering in metal gate/high-k stacks 期刊论文
CHINESE SCIENCE BULLETIN, 2012, 卷号: 57, 期号: 22, 页码: 2872-2878
Huang, AP; Zheng, XH; Xiao, ZS; Wang, M; Di, ZF; Chu, PK
收藏  |  浏览/下载:19/0  |  提交时间:2013/04/17
The effect of blocking layer of Al2O3 on thermal stability and electrical properties of HfO2 dielectric films deposited on SiGe layer 期刊论文
MICROELECTRONIC ENGINEERING, 2008, 卷号: 85, 期号: 9, 页码: 1888-1891
Cheng, XH; He, DW; Zhaorui, SR; Yu, YH; Shen, DS
收藏  |  浏览/下载:16/0  |  提交时间:2012/03/24
Influence of nitrogen element on total-dose radiation response of high-k Hf-based dielectric films 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 卷号: 257, 页码: 501-504
Song, ZR; Cheng, XH; Zhang, EX; Xing, YM; Shen, QW; Yu, YH; Zhang, ZX; Wang, X; Shen, DS
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
Preparation of high-quality Hf-aluminate films by EB-PVD 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2006, 卷号: 35, 期号: 8, 页码: 1192-1194
Cheng, XH; Song, ZR; Yu, YH
收藏  |  浏览/下载:8/0  |  提交时间:2012/03/24
Characteristics of HfxSiyO films grown on Si0.8Ge0.2 layer by electron-beam evaporation 期刊论文
APPLIED PHYSICS LETTERS, 2006, 卷号: 88, 期号: 12, 页码: 122906-122906
Cheng, XH; Song, ZR; Yu, YY; Yang, WW; Shen, DS
收藏  |  浏览/下载:17/0  |  提交时间:2012/03/24
Investigation of Ge nanocrytals in a metal-insulator-semiconductor structure with a HfO2/SiO2 stack as the tunnel dielectric 期刊论文
APPLIED PHYSICS LETTERS, 2005, 卷号: 86, 期号: 11, 页码: 113105-113105
Wang, SY; Liu, WL; Wan, Q; Dai, JY; Lee, PF; Suhua, L; Shen, QW; Zhang, M; Song, ZT; Lin, CL
收藏  |  浏览/下载:12/0  |  提交时间:2012/03/24
Annealing effect on electrical properties of high-k MgZnO film on silicon 期刊论文
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 卷号: 20, 期号: 5, 页码: L15-L19
Liang, J; Wu, HZ; Chen, NB; Xu, TN
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
Self-organized Ge nanocrystals embedded in HfAlO fabricated by pulsed-laser deposition and application to floating gate memory 期刊论文
APPLIED PHYSICS LETTERS, 2005, 卷号: 86, 期号: 1, 页码: 13110-13110
Liu, WL; Lee, PF; Dai, JY; Wang, J; Chan, HLW; Choy, CL; Song, ZT; Feng, SL
收藏  |  浏览/下载:14/0  |  提交时间:2012/03/24


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