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The Effect of Radiation Defects in a Metal Target on the Error in the Thermal-Imaging Diagnostics of Powerful Ion Beams 期刊论文
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2019, 卷号: 62, 页码: 201-207
作者:  Isakova, Yu. I.;  Prima, A. I.;  Zhu, X. P.;  Ding, L.;  Pushkarev, A. I.
收藏  |  浏览/下载:62/0  |  提交时间:2019/12/02
Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 卷号: 52
作者:  Zhang, Yu-Ru;  Zhao, Zhuan-Zhuan;  Xue, Chan;  Gao, Fei;  Wang, You-Nian
收藏  |  浏览/下载:67/0  |  提交时间:2019/12/02
Bipolar high power impulse magnetron sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias 期刊论文
THIN SOLID FILMS, 2019, 卷号: 688
作者:  Viloan, Rommel Paulo B.;  Gu, Jiabin;  Boyd, Robert;  Keraudyd, Julien;  Li, Liuhe
收藏  |  浏览/下载:51/0  |  提交时间:2019/12/30


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