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CORC

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Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing 期刊论文
TRIBOLOGY INTERNATIONAL, 2019, 卷号: 138, 页码: 307-315
作者:  Wang, Lin;  Zhou, Ping;  Yan, Ying;  Kang, Renke;  Guo, Dongming
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02
Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency 期刊论文
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019, 卷号: 55, 页码: 14-21
作者:  Ou, Li -Wei;  Wang, Ya-Hui;  Hu, Hui-Qing;  Zhang, Liang-Liang;  Dong, Zhi-Gang
收藏  |  浏览/下载：10/0  |  提交时间：2019/12/02
A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal 期刊论文
APPLIED SURFACE SCIENCE, 2019, 卷号: 496
作者:  Zhang, Zili;  Jin, Zhuji;  Guo, Jiang;  Han, Xiaolong;  Mu, Qing
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Investigation of material removal rate and surface roughness using multi-objective optimization for micro-milling of inconel 718 期刊论文
INDUSTRIAL LUBRICATION AND TRIBOLOGY, 2019, 卷号: 71, 页码: 787-794
作者:  Lu, Xiaohong;  Wang, FuRui;  Xue, Liang;  Feng, Yixuan;  Liang, Steven Y.
收藏  |  浏览/下载：14/0  |  提交时间：2019/12/02
A theoretical and experimental investigation on ultrasonic assisted grinding from the single-grain aspect 期刊论文
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2018, 卷号: 148, 页码: 667-675
作者:  Zheng, Feifei;  Kang, Renke;  Dong, Zhigang;  Guo, Jiang;  Liu, Jinting
收藏  |  浏览/下载：114/0  |  提交时间：2019/12/02
Cutting parameters optimization for MRR under the constraints of surface roughness and cutter breakage in micro-milling process 期刊论文
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2018, 卷号: 32, 页码: 3379-3388
作者:  Lu, Xiaohong;  Zhang, Haixing;  Jia, Zhenyuan;  Feng, Yixuan;  Liang, Steven Y.
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/02
A novel media properties-based material removal rate model for magnetic field-assisted finishing 期刊论文
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2018, 卷号: 141, 页码: 189-197
作者:  Kum, Chun Wai;  Sato, Takashi;  Guo, Jiang;  Liu, Kui;  Butler, David
收藏  |  浏览/下载：12/0  |  提交时间：2019/12/02
A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad 期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 卷号: 77, 页码: 107-116
作者:  Zhou, Ping
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/09
Effect of surface profile on the material removal rate distribution in CMP process 期刊论文
Advanced Materials Research, 2014, 卷号: 1017, 页码: 715-719
作者:  Zhou, P.;  Cai, J.Q.;  Li, Z.W.;  Kang, R.K.;  Jin, Z.J.
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/11
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing 期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2013, 卷号: 69, 页码: 1009-1016
作者:  Zhou, Ping;  Guo, Dongming;  Kang, Renke;  Jin, Zhuji
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/11

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