| A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal | |
| Zhang, Zili; Jin, Zhuji; Guo, Jiang; Han, Xiaolong; Mu, Qing; Zhu, Xianglong | |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 2019 | |
| 卷号 | 496 |
| 关键词 | Yttrium aluminum garnet Chemical mechanical polishing Surface roughness Material removal rate Reaction mechanism |
| ISSN号 | 0169-4332 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3224472 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Sch Mech Engn, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhang, Zili,Jin, Zhuji,Guo, Jiang,et al. A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal[J]. APPLIED SURFACE SCIENCE,2019,496. |
| APA | Zhang, Zili,Jin, Zhuji,Guo, Jiang,Han, Xiaolong,Mu, Qing,&Zhu, Xianglong.(2019).A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal.APPLIED SURFACE SCIENCE,496. |
| MLA | Zhang, Zili,et al."A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal".APPLIED SURFACE SCIENCE 496(2019). |
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