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CORC

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Quality evaluation and simulation of through-multilayer TSV integration process for memory stacking 其他
2015-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Jin, Yufeng; Ma, Shenglin
收藏  |  浏览/下载：8/0  |  提交时间：2017/12/03
Quality Evaluation and Simulation of Through-Multilayer TSV Integration Process for Memory Stacking 其他
2015-01-01
Guan, Yang; Zeng, Qinghua; Chen, Jing; Jin, Yufeng; Ma, Shenglin
收藏  |  浏览/下载：6/0  |  提交时间：2017/12/03
Field-assisted titanium-glass bonding 其他
2014-01-01
Li, Tianyu; Zhang, Yiming; Luo, Jin; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/17
Mechanical strength of anchor-microbeam combined structure fabricated by silicon-on-glass process 其他
2014-01-01
He, Jun; Huang, Xian; Zhang, Li; Zhao, Danqi; Yang, Fang; Wang, Wei; Zhang, Dacheng
收藏  |  浏览/下载：6/0  |  提交时间：2017/12/03
Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process 其他
2014-01-01
He, Jun; Huang, Xian; Zhang, Li; Zhao, Danqi; Yang, Fang; Wang, Wei; Zhang, Dacheng
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
Electrical Interconnect in MEMS/NEMS Devices by Au/a-Si Eutectic Reaction 其他
2013-01-01
Huang, X.; Zhao, D. Q.; He, J.; Fan, X. J.; Yang, F.; Zhang, D. C.
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16
SILICON  WAFER  
Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process 其他
2013-01-01
Xu, Huiming; Zhang, H; Deng, Zhiqia; San, Haishen; Yu, Yuxi; 伞海生; 余煜玺
收藏  |  浏览/下载：4/0  |  提交时间：2015/07/22
Low temperature wafer direct bonding using wet chemical treatment 其他
2012-01-01
Zhao, Yanli; Song, Zijun; Li, Yan; San, Haisheng; Yu, Yuxi; 伞海生; 余煜玺
收藏  |  浏览/下载：3/0  |  提交时间：2015/07/22
Mechanical strength characterization for silicon-to-silicon direct bonding 其他
2012-01-01
Yan, Xin; Zhao, Yan Li; San, Hai Sheng; Yu, Yu Xi; Chen, Xu Yuan; 伞海生; 余煜玺; 陈旭远
收藏  |  浏览/下载：2/0  |  提交时间：2015/07/22
Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic package and electrical interconnecting 其他
2011-01-01
Zheng, Xiaoshan; Yan, Xin; Song, Zijun; San, Haisheng; Chen, Xuyu; 伞海生; 陈旭远
收藏  |  浏览/下载：3/0  |  提交时间：2015/07/22

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