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浏览/检索结果: 共6条，第1-6条 帮助 限定条件 内容类型：会议论文     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator 会议论文 Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017 作者:  Ma, Wenying;  Ma, Changwei;  Wang, Weimin 收藏  |  浏览/下载：48/0  |  提交时间：2019/08/23 Adaptive optics  Deformation  Delta modulation  Electromechanical devices  Laser pulses  MEMS  Mirrors  Structural design  Surface micromachining   Laser nano-manufacturing technology and applications towards optical functional nanostructures and devices 会议论文 Shanghai, China, June 28, 2015 - July 2, 2015 作者:  Zheng, Mei-Ling;  Duan, Xuan-Ming 收藏  |  浏览/下载：10/0  |  提交时间：2018/03/16 Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process 会议论文 Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC Jing-Feng Li; Songzhe Jin; Yong Li 收藏  |  浏览/下载：2/0 Design and fabrication of a novel micromechanical variable optical attenuator 会议论文 Wang, CS; Li, HJ; Fang, J; Zhang, DC; Chang, S 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13 variable optical attenuator (VOA)  fiber optics  microelectromechanical systems (MEMS)  micro-optical devices   High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (EI收录) 会议论文 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings, Taipei, Taiwan, October 27, 2014 - October 31, 2014 作者:  Chen, H.[1] 收藏  |  浏览/下载：2/0  |  提交时间：2019/04/12 Adaptive algorithms  Closed loop control systems  Computer programming languages  Electrodes  Field programmable gate arrays (FPGA)  Image acquisition  Laser applications  MEMS  Microelectromechanical devices  Microscopes  Scanning  Sliding mode control  Surface analysis   Application of twisting algorithm to a 2D electrostatic MEMS micromirror (EI收录) 会议论文 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings, Suzhou, China, August 26, 2013 - August 30, 2013 作者:  Chen, Hui[1];  Pallapa, Manu[2];  Sun, Weijie[1];  Sun, Zhendong[1];  Yeow, John T. W.[2] 收藏  |  浏览/下载：9/0  |  提交时间：2019/04/15 Closed loop control systems  Electrostatic actuators  Electrostatics  Manufacture  Microelectromechanical devices  Nanotechnology  Sliding mode control  Uncertainty analysis