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	High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (EI收录)
	Chen, H.[1]; Sun, W.J.[1]; Chen, A.I.H.[2]; Yeow, J.T.W.[2]; Sun, Z.D.[3]
会议名称	2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings
会议日期	October 27, 2014 - October 31, 2014
会议地点	Taipei, Taiwan
关键词	Adaptive algorithms Closed loop control systems Computer programming languages Electrodes Field programmable gate arrays (FPGA) Image acquisition Laser applications MEMS Microelectromechanical devices Microscopes Scanning Sliding mode control Surface analysis
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2046563
专题	华南理工大学
作者单位	1.[1] College of Automation Science and Engineering, South China University of Technology, Guangzhou, China 2.[2] Systems Design Engineering, University of Waterloo, Waterloo, Canada 3.[3] Key Lab of Systems and Control, Academy of Mathematics and Systems Science, Chinese Academy of Sciences, Beijing, China
推荐引用方式 GB/T 7714	Chen, H.[1],Sun, W.J.[1],Chen, A.I.H.[2],等. High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (EI收录)[C]. 见:2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings. Taipei, Taiwan. October 27, 2014 - October 31, 2014.

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