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	Design and fabrication of a novel micromechanical variable optical attenuator
	Wang, CS ; Li, HJ ; Fang, J ; Zhang, DC ; Chang, S
	2001
关键词	variable optical attenuator (VOA) fiber optics microelectromechanical systems (MEMS) micro-optical devices
DOI	10.1117/12.444755
英文摘要	A novel micromechanical variable optical attenuator (VOA) for single mode fibers based on MEMS is presented in this paper. The fabrication of the micromechanical VOA combines the processes of wafer bonding and deep reactive ion etch (RIE) that presents a simply procedure of MEMS manufacturing. The VOA consists of a slope anchor and a beam with a shutter, in which the beam is laterally driven by electrostatic actuator. It is important to design and optimize the slope anchor to produce large shutter displacement with low driving voltage. In this design, the shutter's displacement and beam diffraction is computed to estimate the device performance as applied voltage changed. We conclude that, based on the status of current fabrication technologies, the proposed design is feasible to be implemented and shows a good candidate for the power management in complex WDM networks.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000176126700074&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Instruments & Instrumentation; Optics; EI; CPCI-S(ISTP); 1
语种	英语
内容类型	会议论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/315744]
专题	工学院
推荐引用方式 GB/T 7714	Wang, CS,Li, HJ,Fang, J,et al. Design and fabrication of a novel micromechanical variable optical attenuator[C]. 见:.

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