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AlN thin films prepared by reactive ion beam coating 期刊论文
FUNDAMENTAL MECHANISMS OF LOW-ENERGY-BEAM-MODIFIED SURFACE GROWTH AND PROCESSING, 2000, 卷号: 585, 期号: 0, 页码: 251-256
Cheng,LL; Yu,YH; Sundaravel,B; Luo,EZ; Lin,S; Lei,YM; Ren,CX; Cheung,WY; Wong,SP; Xu,JB; Wilson,IH
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