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浏览/检索结果: 共3条，第1-3条 帮助 限定条件 内容类型：会议     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A Paradigm Shift in Patterning Foundation from Frequency Multiplication to Edge-Placement Accuracy - A Novel Processing Solution by Selective (CPCI-S收录) 会议 作者:  Han, Ting[1];  Liu, Hongyi[1];  Chen, Yijian[1] 收藏  |  浏览/下载：19/0  |  提交时间：2019/04/11 edge-placement errors (EPE)  alternating-material (dual-material) self-aligned multiple patterning (altSAMP)  alternating-material (dual-material) self-aligned quadruple/sextuple patterning (altSAQP/altSASP)  selective etching  cut-hole layout decomposition  probability of failure (POF)   Layout Decomposition and Synthesis for a Modular Technology to Solve the Edge-Placement Challenges by Combining Selective Etching, Direct Sti (CPCI-S收录) 会议 作者:  Liu, Hongyi[1];  Han, Ting[1];  Zhou, Jun[1];  Chen, Yijian[1] 收藏  |  浏览/下载：12/0  |  提交时间：2019/04/11 edge-placement errors (EPE)  selective etching  alternating-material (dual-material) self-aligned multiple patterning (altSAMP)  alternating-material (dual-material) self-aligned quadruple/sextuple patterning (altSAQP/altSASP)  direct stitching  layout decomposition and synthesis   Cut-hole layout decomposition and synthesis to reduce the effect of edge-placement errors (CPCI-S收录) 会议 作者:  Liu, Hongyi[1];  Han, Ting[1];  Chen, Yijian[1] 收藏  |  浏览/下载：8/0  |  提交时间：2019/04/11 Edge-placement errors  Selective etching  Alternating-material self-aligned multiple patterning  Layout decomposition and synthesis