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STUDY ON THE INFLUENCE OF CONTACT GLUE LAYER GROWTH CONDITION ON THE QUALITY OF GAP FILL TUNGSTEN LAYER 其他
2016-01-01
Liu, Jianqiang; Wu, Hanming; Zhang, Xing; Wang, Yi; Lu, Zhizhong; Tian, Chao
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Study on the influence of contact glue layer growth condition on the quality of gap fill tungsten layer 其他
2016-01-01
Liu, Jianqiang; Wu, Hanming; Zhang, Xing; Wang, Yi; Lu, Zhizhong; Tian, Chao
收藏  |  浏览/下载：6/0  |  提交时间：2017/12/03
Controllable Synthesis and Property of Ceria-based Nano-and Meso-Materials 其他
2014-01-01
Chun-Hua Yan; Ling-Dong Sun; Ya-Wen Zhang
收藏  |  浏览/下载：1/0  |  提交时间：2017/12/03
Feature-Scale Simulations of Particulate Slurry Flows in Chemical Mechanical Polishing by Smoothed Particle Hydrodynamics 其他
2014-01-01
Wang, Dong; Shao, Sihong; Yan, Changhao; Cai, Wei; Zeng, Xuan
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/16
Subsurface damage detection and damage mechanism analysis of chemical-mechanical polished optics 其他
2014-01-01
Ye, Hui; Yang, Wei; Bi, Guo; Yang, Ping; Guo, Yinbiao; 杨炜; 毕果; 杨平; 郭隐彪
收藏  |  浏览/下载：3/0  |  提交时间：2015/07/22
Chemical-Mechanical Polishing of Bulk Tungsten Substrate 其他
2013-01-01
Luo, Jin; Zhang, Yiming; Song, Lu; Chen, Shuhui; Bian, Yuan; Li, Tianyu; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/16
A facile method to fabricate ultrathin vertical ZnO nanowall arrays 其他
2013-01-01
Zhao, Duan; Zhang, Xiaoxian; Zeng, Qingsheng; Dong, Haibo; Li, Jinzhu; Cai, Le; Wang, Chaoying; Zhou, Weiya; Xie, Sishen
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
The study on subsurface damage depth and morphology of optical material 其他
2013-01-01
Yang, Wei; Ye, Hui; 杨炜
收藏  |  浏览/下载：4/0  |  提交时间：2015/07/22
Discussion on the lapping and polishing process of 4H-SiC wafer 其他
2013-01-01
Cheng, Wei; Yin, Yugang; Li, Yipan; Zhang, Haoer; Zhang, Shiming; Wang, Lingyun; Sun, Daoheng; 孙道恒
收藏  |  浏览/下载：3/0  |  提交时间：2015/07/22
Research on the optimization of the bonnet polishing tool 其他
2013-01-01
Wang, Chunjin; Yang, Wei; Wang, Zhenzhong; Pan, Ri; Guo, Yinbiao; 杨炜; 王振忠; 郭隐彪
收藏  |  浏览/下载：4/0  |  提交时间：2015/07/22

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