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科研机构
上海大学 [53]
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期刊论文 [43]
会议论文 [10]
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2019 [4]
2018 [13]
2017 [15]
2016 [5]
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专题:上海大学
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Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO₂ Super-Lattice
期刊论文
Nanomaterials (Basel, Switzerland), 2019, 卷号: 9, 页码: 1-13
作者:
Ma Hong-Ping[1]
;
Yang Jia-He[2]
;
Yang Jian-Guo[3]
;
Zhu Li-Yuan[4]
;
Huang Wei[5]
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2019/04/22
SiO2
SiOx
plasma-enhanced atomic layer deposition (PEALD)
stoichiometry
superlattice
Chemical Vapor Deposition of Vertically Aligned Carbon Nanotube Arrays: Critical Effects of Oxide Buffer Layers
期刊论文
Nanoscale research letters, 2019, 卷号: 14, 页码: 106
作者:
Li Haohao[1]
;
Yuan Guangjie[2]
;
Shan Bo[3]
;
Zhang Xiaoxin[4]
;
Ma Hongping[5]
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2019/04/22
Atomic layer deposition
Chemical vapor deposition
Oxide buffer layers
Vertically aligned carbon nanotubes
Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 卷号: 66, 页码: 1760-1765
作者:
Yang, Jun[1]
;
Zhang, Yongpeng[2]
;
Qin, Cunping[3]
;
Ding, Xingwei[4]
;
Zhang, Jianhua[5]
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/04/22
Atomic layer deposition (ALD)
oxygen defects
temperature stability
Zr-doped ZnO (ZrZnO) thin-film transistors (TFTs)
Atomic layer deposition of buffer layers for the growth of vertically aligned carbon nanotube arrays
期刊论文
Nanoscale Research Letters, 2019, 卷号: 14, 页码: 119
作者:
Haohao Li[1]
;
Guangjie Yuan[2]
;
Bo Shan[3]
;
Xiaoxin Zhang[4]
;
Hongping Ma[5]
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2019/04/22
Atomic layer deposition
Oxide buffer layers
Thermal interface materials
Vertically aligned carbon nanotube arrays
High Performance ZnSnO Thin Film Transistor with ZrO2 Gate Insulator Formed by Atomic Layer Deposition
期刊论文
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2018, 卷号: 13, 页码: 214-220
作者:
Li, Jun[1]
;
Huang, Chuan-Xin[2]
;
Zhao, Cheng-Yu[3]
;
Ding, Xingwei[4]
;
Zhang, Jian-Hua[5]
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/04/24
ZTO TFTs
ALD ZrO2
Stability
Density of States
High-quality lead sulfide nanofilm deposited on silica fiber substrate by atomic layer deposition technology
会议论文
NANOPHOTONICS AND MICRO/NANO OPTICS IV, 2018-01-01
作者:
Pan, Xiangping[1]
;
Dong, Yanhua[2]
;
Wen, Jianxiang[3]
;
Zheng, Jiajia[4]
;
Su, Caiyun[5]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/22
Lead sulfide
nanofilm
atomic layer deposition
optical properties
Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition
期刊论文
NANOMATERIALS, 2018, 卷号: 8, 页码: 1-14
作者:
Ma, Hong-Ping[1]
;
Lu, Hong-Liang[2]
;
Yang, Jia-He[3]
;
Li, Xiao-Xi[4]
;
Wang, Tao[5]
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/04/22
silicon nitride
silicon oxynitride
plasma enhanced atomic layer deposition
oxygen contamination
optical properties
Critical atomic-level processing technologies: Remote plasma-enhanced atomic layer deposition and atomic layer etching
期刊论文
Micro and Nanosystems, 2018, 卷号: 10, 页码: 76-83
作者:
Guangjie Yuan[1]
;
Haohao Li[2]
;
Bo Shan[3]
;
Johan Liu[4]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/22
Ultraviolet Irradiation Effects on luminescent Centres in Bismuth-Doped and Bismuth-Erbium Co-Doped Optical Fibers via Atomic Layer Deposition
期刊论文
ELECTRONICS, 2018, 卷号: 7
作者:
Uddin, Rahim[1]
;
Wen, Jianxiang[2]
;
He, Tao[3]
;
Pang, Fufei[4]
;
Chen, Zhenyi[5]
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/04/22
UV irradiation
luminescent centres
bismuth ions
two-photon process
Zr2N2O Coating-Improved Corrosion Resistance for the Anodic Dissolution Induced by Cathodic Transient Potential
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2018, 卷号: 10, 页码: 40111-40124
作者:
Wang, Xian-Zong[1]
;
Luo, Hong[2]
;
Muneshwar, Triratna[3]
;
Fan, Hong-Qiang[4]
;
Cadien, Ken[5]
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2019/04/22
cathode transient potential
metal bipolar plates
polymer electrolyte membrane fuel cell
transpassive dissolution
zirconium oxynitride coating
plasma-enhanced atomic layer deposition
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