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CORC

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Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Etched p-Type Si Nanowires for Efficient Ozone Decomposition 期刊论文
NANOSCALE RESEARCH LETTERS, 2019, 卷号: 14, 期号: 1, 页码: 5
作者:  Li, Xuan;  Luo, Linqu;  Bi, Yicheng;  Wang, Anqi;  Chen, Yunfa
收藏  |  浏览/下载：9/0  |  提交时间：2020/03/24
Auxiliary structure of nano-pinnacle prepared on silicon substrate: Improving the emission intensity by 9 times in SSI-LEDs 期刊论文
Materials Science in Semiconductor Processing, 2019, 卷号: 93, 页码: 226-230
作者:  Liu, Lingguang;  Wang, Yaogong;  Lin, Yuanyuan;  Zhang, Xiaoning;  Kuo, Yue
收藏  |  浏览/下载：50/0  |  提交时间：2019/03/04
Uniform Metal-Assisted Chemical Etching for Ultra-High-Aspect-Ratio Microstructures on Silicon 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 卷号: 28, 期号: 1, 页码: 143-153
作者:  Li, Liyi;  Tuan, Chia-Chi;  Zhang, Cheng;  Chen, Yun;  Lian, Gang
收藏  |  浏览/下载：15/0  |  提交时间：2019/12/11
High-power and reliable GaN-based vertical light-emitting diodes on 4-inch silicon substrate 期刊论文
Optics Express, 2019, 卷号: 27, 期号: 20, 页码: A1506-A1516
作者:  S.J.Zhou;  H.H.Xu;  B.Tang;  Y.C.Liu;  H.Wan
收藏  |  浏览/下载：0/0  |  提交时间：2020/08/24
A continuous, single-face wet texturing process for industrial multicrystalline silicon solar cells using a surfactant treated photoresist mask 期刊论文
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2018, 卷号: 180, 页码: 173-183
作者:  Zhang, Hong;  Ding, Bin;  Xiang, Yang;  Chen, Tianhang
收藏  |  浏览/下载：13/0  |  提交时间：2019/11/26
Uniform Metal-Assisted Chemical Etching for Ultra-High-Aspect-Ratio Microstructures on Silicon 期刊论文
Journal of Microelectromechanical Systems, 2018
作者:  Li L.;  Tuan C.;  Zhang C.;  Chen Y.;  Lian G.
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/11
A wet etching approach for the via-reveal of a wafer with through silicon vias 期刊论文
Microelectronic Engineering, 2017
作者:  Xiao F(肖斐);  Song CS(宋崇申);  Wang L(王磊);  Cao LQ(曹立强);  Zhang WQ(张文奇)
收藏  |  浏览/下载：12/0  |  提交时间：2018/05/11
Alternative method to fabricate microdevices on a freestanding Si3N4 window 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017
Wang, Zhenhai; Yang, Fan; Han, Danhong; Li, Gang; Xu, Jingjing; Xu, Shengyong
收藏  |  浏览/下载：7/0  |  提交时间：2017/12/03
Novel combined through-wafer-groove fabrication approach and its application in wafer level packaging of gaas ccd 期刊论文
Microsystem technologies-micro-and nanosystems-information storage and processing systems, 2016, 卷号: 22, 期号: 8, 页码: 1983-1989
作者:  Ye, Jiaotuo;  Wang, Shuangfu;  Zhu, Chunsheng;  Xu, Gaowei;  Luo, Le
收藏  |  浏览/下载：20/0  |  提交时间：2019/05/09

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