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| Integrated electrochemical analysis of polyvinylpyrrolidone(PVP) as the inhibitor for copper chemical mechanical planarization(Cu-CMP） 期刊论文
Journal of Alloys and Compounds, 2019
作者: GuangYang; HaixuWang; NingWang; RongSuna; Ching-PingWong
  收藏 | 浏览/下载：34/0 | 提交时间：2019/01/31 |
| Effect of Non-Ionic Surfactant on Chemical Mechanical Planarization Performance in Alkaline Copper Slurry 期刊论文
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2018
作者: Chen L(陈岚); Cao H(曹鹤); Xu QZ(徐勤志); Yang F(杨飞)
收藏 | 浏览/下载：15/0 | 提交时间：2019/04/25 |
| An Oxide Chemical Mechanical Planarization Model for HKMG Structures 期刊论文
ECS Journal of Solid State Science and Technology, 2018
作者: Sun Y(孙艳); Liu HW(刘宏伟); Chen L(陈岚); Xu QZ(徐勤志); Yang F(杨飞)
收藏 | 浏览/下载：8/0 | 提交时间：2019/04/25 |
| Nanoscratching of copper surface by CeO2 期刊论文
ACTA MATERIALIA, 2017, 卷号: 124, 页码: 343-350
作者: Xu, Ning; Han, Weizhong; Wang, Yuchun; Li, Ju; Shan, Zhiwei
收藏 | 浏览/下载：11/0 | 提交时间：2019/11/26
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| 布线图案导致的集成电路平坦化损伤研究 期刊论文
2016, 2016
郭玉龙; 郭丹; 潘国顺; 雒建斌; GUO Yulong; GUO Dan; PAN Guoshun; LUO Jianbin
收藏 | 浏览/下载：8/0 |
| A Chemical Mechanical Planarization Model Including Global Pressure Distribution and Feature Size Effects 期刊论文
IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY, 2016
作者: Yang ZW(杨紫薇); Xu QZ(徐勤志); Chen L(陈岚)
收藏 | 浏览/下载：4/0 | 提交时间：2017/04/12 |
| Fabrication, Characterization, and Simulation of a Low-Cost TSV Integration Without Front-Side CMP Process 期刊论文
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2016
Guan, Yong; Zhu, Yunhui; Ma, Shenglin; Zeng, Qinghua; Chen, Jing; Jin, Yufeng
收藏 | 浏览/下载：2/0 | 提交时间：2017/12/03
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| A chip-scale chemical mechanical planarization model for copper interconnect structures 期刊论文
Microelectronic Engineering, 2015
作者: Xu QZ(徐勤志) ; Fang JJ(方晶晶); Chen L(陈岚)
收藏 | 浏览/下载：6/0 | 提交时间：2016/06/02 |
| A Material Removal Rate Model for Aluminum Gate Chemical Mechanical Planarization 期刊论文
ECS Journal of Solid State Science and Technology, 2015
作者: Xu QZ(徐勤志); Chen L(陈岚)
收藏 | 浏览/下载：9/0 | 提交时间：2016/06/02 |
| Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization 期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 2015, 卷号: 44, 期号: 7, 页码: 2522-2528
作者: Chen, Ailian[1]; Chen, Yang[2]; Ding, Jianning[3]
收藏 | 浏览/下载：3/0 | 提交时间：2019/12/24
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