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Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures 期刊论文
INTEGRATED FERROELECTRICS, 2011, 卷号: 129, 页码: 122-132
Dong, LX; Huo, WH; Yan, HX; Sun, LL
收藏  |  浏览/下载：18/0  |  提交时间：2012/04/12
Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2218-2224
Bao, XQ（包晓晴）; Dargent, T; Grondel, S; Paquet, JB; Cattan, E
收藏  |  浏览/下载：11/0  |  提交时间：2012/04/12
Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 卷号: 20, 期号: 2, 页码: 25005-25005
Bao, XQ; Dargent, T; Cattan, E
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
A generic numerical model for detection of terahertz radiation in MOS field-effect transistors 期刊论文
SOLID-STATE ELECTRONICS, 2010, 卷号: 54, 期号: 8, 页码: 791-795
Wang, YL; Yan, ZF; Zhu, JX; Zhang, LN; Lin, XN; He, J; Cao, JC; Chan, MS
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
Modeling of Front-Etched Micromachined Thermopile IR Detector by CMOS Technology 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 卷号: 19, 期号: 6, 页码: 1331-1340
Xu, DH; Xiong, B; Wang, YL
收藏  |  浏览/下载：22/0  |  提交时间：2011/12/17
Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection 期刊论文
MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 11, 页码: 2317-2322
Yang, YL; Chen, Y; Xu, PC; Li, XX
收藏  |  浏览/下载：13/0  |  提交时间：2011/12/17
New substrate-triggered ESD protection structures in a 0.18-mu m CMOS process without extra mask 期刊论文
MICROELECTRONICS RELIABILITY, 2009, 卷号: 49, 期号: 1, 页码: 17-25
Shan, Y; He, J; Huang, W
收藏  |  浏览/下载：6/0  |  提交时间：2012/03/24
Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 卷号: 19, 期号: 4, 页码: 45023-45023
Yu, HT; Li, XX; Gan, XH; Liu, YJ; Liu, X; Xu, PC; Li, JG; Liu, M
收藏  |  浏览/下载：16/0  |  提交时间：2011/12/17
Investigation of On-Chip Soft-Ferrite-Integrated Inductors for RF ICs-Part I: Design and Simulation 期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2009, 卷号: 56, 期号: 12, 页码: 3133-3140
Yang, C; Liu, F; Wang, X; Zhan, J; Wang, A; Ren, TL; Liu, LT; Long, HB; Wu, ZZ; Li, XX
收藏  |  浏览/下载：33/0  |  提交时间：2011/12/17
A non-isothermal model for squeeze film damping of rarefied gas 期刊论文
2009 IEEE SENSORS, VOLS 1-3, 2009, 页码: 213-216
Yang, H; Cheng, HT; Dai, B; Li, XX; Wang, YL
收藏  |  浏览/下载：16/0  |  提交时间：2011/12/17

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