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Orthogonal experiment and analysis of power spectral density on process parameters of pitch tool polishing 期刊论文
OPTICAL REVIEW, 2017, 卷号: 24, 期号: 1, 页码: 1-10
作者:  Meng, Kai;  Wan, Yongjian;  Wu, Fan;  Shen, Lijun;  Wu, Hsing-Yu
收藏  |  浏览/下载:20/0  |  提交时间:2018/11/20
A sampling method to measure surface roughness of circular flat 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2014
作者:  Meng, Kai;  Wan, Yongjian;  Wu, Fan;  Shen, Lijun;  Song, Weihong
收藏  |  浏览/下载:15/0  |  提交时间:2016/11/24


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