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	A sampling method to measure surface roughness of circular flat
	Meng, Kai1,2; Wan, Yongjian1; Wu, Fan1; Shen, Lijun1,2; Song, Weihong1,2
	2014
会议名称	Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期	2014
卷号	9282
页码	92820J
中文摘要	We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.
英文摘要	We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.
收录类别	EI
学科主题	Manufacture - Optical testing - Surface measurement
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7624]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式 GB/T 7714	Meng, Kai,Wan, Yongjian,Wu, Fan,et al. A sampling method to measure surface roughness of circular flat[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.

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