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A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 卷号: 244, 页码: 66-76
作者:  Xu, Tingzhong;  Zhao, Libo;  Jiang, Zhuangde;  Guo, Xin;  Ding, Jianjun
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