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	A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
	Xu, Tingzhong; Zhao, Libo; Jiang, Zhuangde; Guo, Xin; Ding, Jianjun; Xiang, Wei; Zhao, Yulong
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2016
卷号	244页码:66-76
关键词	Peninsula-island structure Sensitivity Ultra-low pressure sensor Non-linearity MEMS
ISSN号	0924-4247
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2963257
专题	西安交通大学
推荐引用方式 GB/T 7714	Xu, Tingzhong,Zhao, Libo,Jiang, Zhuangde,et al. A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure[J]. SENSORS AND ACTUATORS A-PHYSICAL,2016,244:66-76.
APA	Xu, Tingzhong.,Zhao, Libo.,Jiang, Zhuangde.,Guo, Xin.,Ding, Jianjun.,...&Zhao, Yulong.(2016).A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure.SENSORS AND ACTUATORS A-PHYSICAL,244,66-76.
MLA	Xu, Tingzhong,et al."A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure".SENSORS AND ACTUATORS A-PHYSICAL 244(2016):66-76.

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