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Research on ion implantation in MEMS device fabrication by theory, simulation and experiments
期刊论文
INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2018, 卷号: 32
作者:
Bai, Minyu
;
Zhao, Yulong
;
Jiao, Binbin
;
Zhu, Lingjian
;
Zhang, Guodong
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
fabrication
Ion implantation
microelectromechanical systems (MEMS)
Design and Performance Test of an Ocean Turbulent Kinetic Energy Dissipation Rate Measurement Probe
期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:
Tian, Bian
;
Li, Huafeng
;
Yang, Hua
;
Zhao, Yulong
;
Chen, Pei
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/11/26
marine environmental monitoring
microelectromechanical systems (MEMS) piezoresistive sensor chip
probe
Taguchi method
turbulent kinetic energy dissipation rate
Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance
期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:
Zhang, Guo-Dong
;
Zhao, Yu-Long
;
Zhao, Yun
;
Wang, Xin-Chen
;
Wei, Xue-Yong
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
high-temperature resistance
microelectromechanical systems (MEMS) technology
silicon-on-insulator (SOI) piezoresistive element
small size
ultra-high pressure sensor
A Localization Database Establishment Method Based on Crowdsourcing Inertial Sensor Data and Quality Assessment Criteria
期刊论文
IEEE INTERNET OF THINGS JOURNAL, 2018, 卷号: 5, 期号: 6
作者:
Zhang, Peng
;
Chen, Ruizhi
;
Li, You
;
Niu, Xiaoji
;
Wang, Lei
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/12/05
Consumer portable devices crowdsourcing
indoor localization
microelectromechanical systems (MEMS) sensors
WiFi positioning
Research on ion implantation in MEMS device fabrication by theory, simulation and experiments
期刊论文
2018, 卷号: 32
作者:
Bai, Minyu
;
Zhao, Yulong
;
Jiao, Binbin
;
Zhu, Lingjian
;
Zhang, Guodong
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/20
Ion implantation
microelectromechanical systems (MEMS)
fabrication
Oversampling successive approximation technique for MEMS differential capacitive sensor
期刊论文
IEEE Journal of Solid-State Circuits, 2018, 卷号: 53, 期号: 8, 页码: 2240-2251
作者:
Zhong, Longjie*
;
Lai, Xinquan
;
Xu, Donglai
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/12/27
Accelerometer
common-mode parasitic capacitance
differential capacitive sensor
low-power circuits
microelectromechanical systems (MEMS) sensors
parasitic capacitance insensitive
readout circuit
Improved differential-evolution based optimization design of an axial flux MEMS micromotor
期刊论文
INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS, 2017, 卷号: 53, 页码: 645-661
作者:
Ding, Xiaofeng
;
Liu, Guanliang
;
Zuo, Zongyu
;
Guo, Hong
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/30
An axial flux microelectromechanical systems (AF-MEMS)
differential evolution (DE)
power density
efficiency
finite element analysis (FEA)
A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array
期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 卷号: 26, 期号: 2
作者:
Hu, Fangrong
;
Xu, Ningning
;
Wang, Weiming
;
Wang, Yue'e
;
Zhang, Wentao
收藏
  |  
浏览/下载:44/0
  |  
提交时间:2016/06/27
tunable terahertz absorber
metamaterial
microelectromechanical systems (MEMS)
electrical dipole resonator
electrostatic actuator
Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 卷号: 25, 期号: [db:dc_citation_issue], 页码: 954-962
作者:
Xu, Wei
;
Song, Kui
;
Ma, Shenhui
;
Gao, Bo
;
Chiu, Yi
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/02
Micro calorimetric flow sensor
CMOS microelectromechanical systems (MEMS)
1-D sensor model
Reynolds number
Prandtl number
Thermoresistive
Digital Micromirror Device (DMD)-Based High-Cycle Torsional Fatigue Testing Micromachine for 1D Nanomaterials
期刊论文
MICROMACHINES, 2016, 卷号: 7
作者:
Jiang, Chenchen
;
Hu, Dayong
;
Lu, Yang
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/30
nanowire
digital micromirror device (DMD)
nano-fatigue
nanomechanics
microelectromechanical systems (MEMS)
torsion
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