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清华大学 [35]

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	Monolithic integration of tandem-FAIMS based on overlapping ion peak separation and weak ion peak discovery for gas detection 期刊论文 SENSORS AND ACTUATORS B-CHEMICAL, 2022, 卷号: 362 作者: Liu, Shaomin; Li, Shan; Liu, Youjiang; Jin, Jiao; Ma, He 收藏 \| 浏览/下载：11/0 \| 提交时间：2022/12/23 Ion mobility spectrometry Tandem-FAIMS Micro electro mechanical systems Separation of ion peak
	A Graphene Field Effect Transistor Driven by a MEMS Lamb Wave Resonator 期刊论文 Journal of Tianjin University Science and Technology, 2019, 卷号: Vol.52 No.6, 页码: 594-600 作者: Liang, J.; Sun, C. 收藏 \| 浏览/下载：7/0 \| 提交时间：2019/11/21 Acousto-electric effect Graphene field effect transistor Lamb wave resonator Micro-electro-mechanical system(MEMS)
	Large piezoelectricity on Si from highly -oriented PZT thick films via a CMOS-compatible sputtering/RTP process 期刊论文 Materialia, 2019, 卷号: Vol.5, 页码: 100228 作者: Yingying Wang; Hongbo Cheng; Jing Yan; Ning Chen; Peng Yan 收藏 \| 浏览/下载：11/0 \| 提交时间：2019/12/17 Piezoelectric CMOS-Si Lead zirconate titanate (PZT) ferroelectric film Magnetron sputtering Rapid thermal processing (RTP) Micro-electro-mechanical systems (MEMS)
	Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process 期刊论文 Materialia, 2019, 卷号: 5 作者: Wang Y.; Cheng H.; Yan J.; Chen N.; Yan P. 收藏 \| 浏览/下载：19/0 \| 提交时间：2019/12/11 CMOS-Si Lead zirconate titanate (PZT) ferroelectric film Magnetron sputtering Micro-electro-mechanical systems (MEMS) Piezoelectric Rapid thermal processing (RTP)
	Design and feedforward control of large-rotation two-axis scan mirror assembly with MEMS sensor integration 期刊论文 CHINESE JOURNAL OF AERONAUTICS, 2019, 卷号: 32, 页码: 1912-1922 作者: Huang, Hai; Zheng, Xintao; Li, Weipeng 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/12/30 Adaptive feedforward Micro-Electro-Mechanical System accelerator Scan mirror Topological optimization Vibration suppression
	Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications 期刊论文 MICROSYSTEMS & NANOENGINEERING, 2019, 卷号: 5, 页码: 20 作者: An, Zhonglie; Li, Jinhua; Kikuchi, Akio; Wang, Zhuqing; Jiang, Yonggang 收藏 \| 浏览/下载：101/0 \| 提交时间：2019/12/30 Copper compounds Electronics packaging Graphene Integration Mechanical properties MEMS Natural frequencies Thermal expansion Three dimensional integrated circuits Coefficients of thermal expansions Composite microstructures Interconnect applications Laser Doppler vibrometers Mechanical resonant frequencies Micro electro mechanical system Thermal expansion mismatch Through-Silicon-Via (TSV) Integrated circuit interconnects
	The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge 期刊论文 MICROMACHINES, 2018, 卷号: 9, 页码: 11 作者: Zhao, You; Zhao, Yulong; Ge, Xiaohui 收藏 \| 浏览/下载：11/0 \| 提交时间：2019/11/26 cross-interference cutting force sensor decoupling matrix micro-electro-mechanical system (MEMS) strain gauge sensitivity
	Liquid packaging effects on piezoresistive MEMS accelerometer 会议论文作者: Liu, Xixiang; Jiang, Weile; Zhao, Libo; Jia, Chen; Yu, Mingzhi 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/11/26 Harsh environment Measuring ranges MEMS accelerometer Micro electro mechanical system Non-conducting liquids Piezo-resistive Piezoresistive accelerometers Sensitivity
	Modified design of microstrip interdigital filter with tapped line 期刊论文 PROCEEDINGS OF SPIE, 2018, 卷号: 10799, 页码: UNSP 107990M 作者: Wen, Shu-wen; Gao, Yang; Zhang DP(张大鹏); Zhang, Da-peng; Han, Chao 收藏 \| 浏览/下载：23/0 \| 提交时间：2019/10/10 MEMS (Micro-Electro-Mechanical System) filter interdigital microstrip line grounding via-holes design
	One to 40 GHz ultra-wideband RF MEMS direct-contact switch based on GaAs MMIC technique 期刊论文 IET MICROWAVES ANTENNAS & PROPAGATION, 2018, 卷号: Vol.12 No.6, 页码: 879-884 作者: Chu, CL; Liao, XP 收藏 \| 浏览/下载：10/0 \| 提交时间：2019/12/26 MMIC microwave switches microswitches ultra-wideband RF MEMS direct-contact switch MMIC technique ultra-wideband radio frequency micro-electro-mechanical systems direct-contact switch microwave monolithic integrated circuit process equivalent distributed parameter circuit model frequency 1 GHz to 40 GHz GaAs

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