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The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT 期刊论文
IEEE ACCESS, 2019, 卷号: 7, 页码: 16952-16963
作者:  Dong, Chen;  Ye, Yin;  Liu, Ximeng;  Yang, Yang;  Guo, Wenzhong
收藏  |  浏览/下载:1/0  |  提交时间:2019/11/21
A WAFER-LEVEL PRESSURE CALIBRATION METHOD FOR INTEGRATED ACCELEROMETER AND PRESSURE SENSOR IN TPMS APPLICATION 其他
2015-01-01
Zhang, Yangxi; Meng, Fanrui; Liu, Guandong; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载:2/0  |  提交时间:2017/12/03
A Wafer-level pressure calibration method for integrated accelerometer and pressure sensor in TPMS application 其他
2015-01-01
Zhang, Yangxi; Meng, Fanrui; Liu, Guandong; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载:1/0  |  提交时间:2017/12/03
The Study of Acceleration Effect for Piezoresistive Micro Pressure Sensor 会议论文
作者:  Tian, Bian;  Zhao, Yulong;  Niu, Zhe
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/03
A monolithic integration multifunctional MEMS sensor based on cavity SOI wafer 其他
2014-01-01
Zhang, Yangxi; Yang, Chenchen; Meng, Fanrui; Liu, Guandong; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载:5/0  |  提交时间:2017/12/03
Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 2, 页码: 284-293
Wang, JC; Xia, XY; Li, XX
收藏  |  浏览/下载:27/0  |  提交时间:2013/04/23
A compact Force Sensor with Low Temperature Drift Design Using a Standard CMOS Process 会议论文
5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
作者:  Benxian Peng;  Ting Yu;  Fengqi Yu;  Yuchun Feng
收藏  |  浏览/下载:9/0  |  提交时间:2015/08/21
A novel piezoresistive accelerometer for high accuracy and overload ability 其他
2004-01-01
Zhang, W; Zhang, YF; Wan, PY; Wang, YY
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13
A novel piezoresistive accelerometer for high accuracy and overload ability 其他
2004-01-01
Zhang, Wei; Zhang, Yanfeng; Wan, Peiyuan; Wang, Yangyuan
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13
Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability 其他
2001-01-01
Zhang, W; Cao, XP; Liu, B; Zhang, DC
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13


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