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	A Wafer-level pressure calibration method for integrated accelerometer and pressure sensor in TPMS application
	Zhang, Yangxi ; Meng, Fanrui ; Liu, Guandong ; Gao, Chengchen ; Hao, Yilong
	2015
英文摘要	The tire pressure monitoring system (TPMS) normally contains an accelerometer. For piezoresistive accelerometers, low cost wafer-level full-range calibration is still a challenge. A novel wafer-lever pressure calibration method for accelerometer is reported in this paper. This method can be applied on a beam-block-membrane structure accelerometer which is sensitive to both acceleration and pressure. By measuring accelerometer's full-range response in a static pressure test step, the method can significantly reduce testing cost and workload in TPMS sensor production. Integrated pressure sensor can also be tested in this pressure test step. Simulation results show the feasibility to calculate the accelerometer's response from pressure test results. An integrated sensor (100g+500kPa measure range) for TPMS application was fabricated and measured through pressure test. ? 2015 IEEE.; EI; 2164-2167
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOI标识	10.1109/TRANSDUCERS.2015.7181388
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436777]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Yangxi,Meng, Fanrui,Liu, Guandong,et al. A Wafer-level pressure calibration method for integrated accelerometer and pressure sensor in TPMS application. 2015-01-01.

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