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Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:  Xiao, Dezhi;  Ruan, Qingdong;  Liu, Liangliang;  Shen, Jie;  Cheng, Cheng
收藏  |  浏览/下载：22/0  |  提交时间：2020/11/26
Influence of dry etching on the properties of SiO2 and HfO2 single layers 期刊论文
APPLIED OPTICS, 2020, 卷号: 59, 期号: 5, 页码: A128-A134
作者:  Xie, LY;  Liu, HS;  Zhao, J;  Jiao, HF;  Zhang, JL
收藏  |  浏览/下载：4/0  |  提交时间：2021/09/06
Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching 期刊论文
MICROMACHINES, 2020, 卷号: 11, 期号: 7, 页码: 638
作者:  Lihao Wang;   Meijie Liu ;   Junyuan Zhao ;   Jicong Zhao ;  Yinfang Zhu;  Jinling Yang;   Fuhua Yang
收藏  |  浏览/下载：8/0  |  提交时间：2021/06/28
Surface Modification of High Performance Fibers and Interfacial Properties of Their Reinforced Bismaleimide Resin Matrix Composites 期刊论文
ACTA POLYMERICA SINICA, 2018, 期号: 3, 页码: 323-335
作者:  Chen Ping;  Yu Qi;  Xiong Xuhai;  Liu Dong;  Liu Zhe
收藏  |  浏览/下载：87/0  |  提交时间：2021/02/02
Fabrication and photosensitivity of cds/silicon nanoscrew photoresistor 期刊论文
Chemistryselect, 2017, 卷号: 2, 期号: 27, 页码: 8577-8582
作者:  Liu, Jing;  Yi, Futing;  Zhou, Yue;  Wang, Bo;  Zhang, Tianchong
收藏  |  浏览/下载：29/0  |  提交时间：2019/04/23
Improvement of the GaN/AlGaN HEMTs Performance with BCl3/Cl2/Ar-Based Inductively Coupled Plasma Etching 会议论文
作者:  Wei K(魏珂);  Zheng YK(郑英奎)
收藏  |  浏览/下载：9/0  |  提交时间：2018/07/20
Nanopillars on unpolished substrates and their application in large-area solar cells 期刊论文
Journal of nanoscience and nanotechnology, 2017, 卷号: 17, 期号: 3, 页码: 2012-2018
作者:  Liu, Jing;  Zhang, Xinshuai;  Sun, Gangjie;  Wang, Yuting;  Wang, Bo
收藏  |  浏览/下载：29/0  |  提交时间：2019/04/23
A Study on Inductively Coupled Plasma Etch Rate of HgCdTe at Cryogenic Temperature 会议论文
作者:  Liu FL;  Chen YY;  Ye ZH;  Ding RJ;  He L
收藏  |  浏览/下载：16/0  |  提交时间：2018/11/20
Self-terminated etching of GaN with a high selectivity over AlGaN under inductively coupled Cl-2/N-2/O-2 plasma with a low-energy ion bombardment 期刊论文
APPLIED SURFACE SCIENCE, 2017
作者:  Zhong, Yaozong;  Yu Zhou;  Gao, Hongwei（高宏伟）;  Dai, Shujun（戴淑君）;  He, Junlei（何俊蕾）
收藏  |  浏览/下载：54/0  |  提交时间：2018/02/06
Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells 期刊论文
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 卷号: 17, 期号: 3, 页码: 2012-2018
作者:  Zhang, TC;  Liu J(刘静);  Zhang XS(张新帅);  Sun GJ(孙钢杰);  Liu, J
收藏  |  浏览/下载：24/0  |  提交时间：2019/08/27

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