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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2005 [1]
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The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer (EI CONFERENCE)
会议论文
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
Wu X.
;
Lei F.
;
Yatagai T.
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提交时间:2013/03/25
We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film
the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change
the interferogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.
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