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	The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer (EI CONFERENCE)
	Wu X. ; Lei F. ; Yatagai T.
	2005
会议名称	ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005
会议地点	Changchun, China
关键词	We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change the interferogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33601]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Wu X.,Lei F.,Yatagai T.. The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer (EI CONFERENCE)[C]. 见:ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005. Changchun, China.

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