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Intensity modulation based optical proximity optimization for the maskless lithography 期刊论文
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
作者:  Liu, Jianghui;  Liu, Junbo;  Deng, Qingyuan;  Feng, Jinhua;  Zhou, Shaolin
收藏  |  浏览/下载：19/0  |  提交时间：2021/05/11
Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 4
作者:  Zhou, Shaolin;  Liu, Junbo;  Deng, Qian;  Xie, Changqing;  Chan, Mansun
收藏  |  浏览/下载：59/0  |  提交时间：2016/10/27
The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features 期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
作者:  Liu, Junbo;  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  He, Yu
收藏  |  浏览/下载：17/0  |  提交时间：2018/06/14
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
作者:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin
收藏  |  浏览/下载：34/0  |  提交时间：2018/06/14
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
作者:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu
收藏  |  浏览/下载：23/0  |  提交时间：2015/12/04
Moire fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
OPTICS EXPRESS, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang
收藏  |  浏览/下载：14/0  |  提交时间：2015/12/04
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
作者:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
收藏  |  浏览/下载：18/0  |  提交时间：2015/12/04
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 4, 页码: 4900111
作者:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
收藏  |  浏览/下载：16/0  |  提交时间：2016/11/23
Moiré fringe alignment using composite circular-line gratings for proximity lithography 期刊论文
Optics Express, 2015, 卷号: 23, 期号: 16, 页码: 20905-20915
作者:  Xu, Feng;  Zhou, Shaolin;  Hu, Song;  Jiang, Wenbo;  Luo, Liang
收藏  |  浏览/下载：12/0  |  提交时间：2016/11/23
Spectrum-Integral Talbot Effect for UV Photolithography with Extended DOF 期刊论文
IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
作者:  Liu, Junbo;  Zhou, Shaolin;  Hu, Song;  Gao, Hongtao;  He, Yu
收藏  |  浏览/下载：19/0  |  提交时间：2016/11/23

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