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科研机构
北京航空航天大学 [11]
内容类型
期刊论文 [6]
会议论文 [5]
发表日期
2015 [2]
2014 [3]
2013 [5]
2011 [1]
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专题:北京航空航天大学
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Micro-grating tilt sensor with self-calibration and direct intensity modulation
期刊论文
OPTIK, 2015, 卷号: 126, 页码: 144-147
作者:
Yao, Baoyin
;
Feng, Lishuang
;
Wang, Xiao
;
Liu, Weifang
;
Jiao, Hongchen
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/30
Micro-grating
Tilt sensor
Electrostatic actuation
Direct intensity modulation
Laser relative intensity noise suppression of micro-grating accelerometer based on reference differential detection method
期刊论文
OPTICAL ENGINEERING, 2015, 卷号: 54
作者:
Feng, Lishuang
;
Liu, Weifang
;
Yao, Baoyin
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/30
accelerometer
micro-grating
laser
noise suppression
relative intensity noise
reference differential detection method
Performance and Modeling of a Micro-Grating Accelerometer
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2014, 卷号: 35, 页码: 602-608
作者:
Feng, Lishuang
;
Yao, Baoyin
;
Wang, Xiao
;
Liu, Weifang
;
Liu, Meihua
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/01/06
micro-grating accelerometer
diffraction gratings
interferometer
direct intensity modulation
The experiment research of gas-assisted ion etching nanograting
会议论文
15th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT) / 4th International Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT), Tianjin, PEOPLES R CHINA, 2014-01-01
作者:
Liu, Meihua
;
Feng, Di
;
Li, Yan
;
Yao, Baoyin
;
Zhong, Shuai
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2020/01/06
nanograting
SEM-FIB dual beam system
ion beam etching
gas-assisted ion etching
exposure time
Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings
期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 卷号: 26, 页码: 1027-1030
作者:
Yao, Baoyin
;
Feng, Lishuang
;
Wang, Xiao
;
Liu, Meihua
;
Zhou, Zhen
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2020/01/06
Evanescent wave coupling
subwavelength gratings
MOEMS accelerometer
FIB/SEM dual beam system
Sensitivity improvement of micro-grating accelerometer based on differential detection method
期刊论文
APPLIED OPTICS, 2013, 卷号: 52, 页码: 4091-4096
作者:
Wang, Xiao
;
Feng, Lishuang
;
Yao, Baoyin
;
Ren, Xiaoyuan
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2020/01/06
A Nanometer-Resolution Displacement Measurement System based on Laser Feedback Interferometry
会议论文
2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013-01-01
作者:
Liu, Huilan
;
Yao, Heming
;
Feng, Lishuang
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2020/01/06
displacement measurement
laser feedback interferometry
phase-freezing technology
phase modulator
Design of Monolithic Differential Quartz Vibrating Beam Accelerometer with Optimized Electrode Layout
会议论文
14th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology, (CSMNT) / 3rd International Conference of the Chinese-Society-of-Micro-Nano-Technology, Hangzhou, PEOPLES R CHINA, 2013-01-01
作者:
Wang, Wenpu
;
Zhou, Zhen
;
Feng, Lishuang
;
Yao, Baoyin
;
Yang, Gongliu
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2020/01/06
Monolithic Differential Vibrating Beam Accelerometer
Quartz Resonator
Electrode Layout
Finite Element Analysis
Structure Design of Out-Plane Evanescent Coupling Accelerometer with Sub-wavelength Gratings
会议论文
2013 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2013-01-01
作者:
Yao, Baoyin
;
Feng, Lishuang
;
Zhou, Zhen
;
Wang, Wenpu
;
Wang, Xiao
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2020/01/06
Evnescent waves coupling
Sub-wavelength gratings
Optical MEMS accelerometer
Finite element analysis
Research of the mechanical decoupling of the new VBA
期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2013, 卷号: 42, 页码: 426-430
作者:
Shi, Jie
;
Zhou, Zhen
;
Yao, Baoyin
;
Feng, Lishuang
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/01/06
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