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兰州理工大学 [51]
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会议论文 [61]
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Investigation of effects of pattern structures arrangement on chemical mechanical polishing process
会议论文
Shanghai, China, March 11, 2018 - March 12, 2018
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
|
浏览/下载：1/0
|
提交时间：2020/11/15
Chemical mechanical polishing
Pressure distribution
Semiconductor device manufacture
Signal processing
Silicon wafers
Textile printing
Chemical-mechanical polishing process
Contact pressure distribution
Pattern arrangement
Pattern structure
Polishing processs
Splitting signals
Modeling of evolution process of edge over erosion in copper CMP using frequency components algorithm
会议论文
Shanghai, China, March 13, 2016 - March 14, 2016
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
|
浏览/下载：2/0
|
提交时间：2020/11/15
Copper
Linear systems
Polishing
Semiconductor device manufacture
Silicon wafers
Textile printing
Copper CMP
Evolution process
Frequency components
Pattern density
Pattern structure
Polishing processs
Square waves
Wafer patterns
Research on black-dot defects on galvanized thick sheet surface after galvanizing line
会议论文
6th International Conference on Advanced Design and Manufacturing Engineering (ICADME), Zhuhai, PEOPLES R CHINA
作者:
Zhang Jianqiang
;
Wang Yongwei
;
Chen Changfeng
;
Zheng Yanjun
;
Li Yan
收藏
|
浏览/下载：3/0
|
提交时间：2020/01/03
Construction Materials
local oxidation
SEM
terms of settlement
MODELING OF EVOLUTION PROCESS OF EDGE OVER EROSION IN COPPER CMP USING FREQUENCY COMPONENTS ALGORITHM
会议论文
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
|
浏览/下载：5/0
|
提交时间：2019/11/15
An analytical model of effects of 2-D pad surface textures on contact pressure distribution during CMP
会议论文
Shanghai, China, March 15, 2015 - March 16, 2015
作者:
Wu, Lixiao
;
Yan, Changfeng
收藏
|
浏览/下载：1/0
|
提交时间：2020/11/15
Numerical methods
Pressure distribution
Semiconductor device manufacture
Silicon wafers
Textures
Analytical results
Contact pressure distribution
Contact pressures
Numerical results
Pad asperities
Polishing processs
Simulation data
Surface textures
Double Crack Propagation in Single-Crystal gamma-TiAl Based on Molecular Dynamics Simulation
会议论文
作者:
Cao, Hui
;
Rui, Zhiyuan
;
Feng, Ruicheng
;
Luo, Dechun
;
Yang, Li
收藏
|
浏览/下载：11/0
|
提交时间：2019/11/15
AN ANALYTICAL MODEL OF EFFECTS OF 2-D PAD SURFACE TEXTURES ON CONTACT PRESSURE DISTRIBUTION DURING CMP
会议论文
作者:
Wu, Lixiao
;
Yan, Changfeng
收藏
|
浏览/下载：16/0
|
提交时间：2019/11/15
Trend Feature Extraction in Condition Monitoring by a New Piecewise Linear Representation Method
会议论文
作者:
Yan, Changfeng
;
Yi, Cheng
;
Wu, Lixiao
;
Fang, Jianfang
收藏
|
浏览/下载：10/0
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提交时间：2019/11/15
Trend Feature Extraction
Condition Monitoring
Piecewise Linear Representation
Local Maximum Minimum and Slope
Influence of stress ratio on fatigue crack propagation in TiAl alloy
会议论文
作者:
Feng Ruicheng
;
Rui Zhiyuan
;
Zuo Yanrui
;
Zhang Guotao
;
Yan Changfeng
收藏
|
浏览/下载：8/0
|
提交时间：2019/11/15
fatigue crack propagation
TiAl alloy
stress ratio
Fault Diagnosis Expert System of Turbine Generator Sets Based on Rule Reasoning and Case Reasoning
会议论文
作者:
Yan, Changfeng
;
Wang, Huibin
收藏
|
浏览/下载：7/0
|
提交时间：2019/11/15
Turbine Generator Sets
Fault Diagnosis Expert System
Rule Based Reasoning
Case Based Reasoning
CLIPS
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